Production process of alkoxy silane

Abstract

The invention belongs to the field of chemical engineering, and relates to a production process of alkoxy silane for improving the purity of products. The production process comprises the following steps: A, dewatering alcohol, and conveying the alcohol into reaction equipment to generate an esterification reaction with organic chlorosilane; B, conveying the material into evaporation equipment after the esterification reaction, and evaporating a small part of alcohol in the material; C, neutralizing the distillation product to obtain the alkoxy silane, wherein in a starting phase of the production process, excessive alcohol is added in step A to generate backflow of the alcohol in the reaction equipment; and in the case of backflow of the alcohol, organochlorosilane is added, and the adding dosage of the alcohol is reduced to the dosage consumed in the reaction. The alkoxy silane, and particularly methyl triethoxysilane, is produced by a simple preparation process. Compared with other processes, a rectifying column is eliminated and is replaced by a cyclic evaporator, and a dehydration system and a fixed bed neutralization system are added. By means of control of temperature, pressure and feeding dosage in the reaction process, the HCl content of the alkoxy silane is lower than or equal to 10ppm, and the purity is higher than or equal to 99.0wt%.

Description

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AI Technical Summary

Benefits of technology

This patented technology allows for precise control over certain areas within reactor systems during chemical vapor deposition (CVD). By adjustting how much or what type of compound reacts with each component being deposited on substrates, this results in fewer unwanted impurities such as organohydroxylic acid) that are introduced into the system without affecting its quality level negatively impacted. Additionally, it provides an efficient way to produce high-purity alkoxy silanes while minimizing any harmful side products like halogenated alkenes from excessive use of nitrogen gas.

Problems solved by technology

Technological Problem addressed in this patented technical solution describes how to efficiently manufacturers find ways to enhance their ability to create highly pure organoxymolidsilanes while minimizing wastage and environmental impact associated with producing large quantities of chemical waste. Current techniques involve expensive and cumbersome procedures involving multiple distillations and treatments. Therefore, new technologies aim to simplify the overall production process and reduce energy consumption.

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