Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Calibration device for working distance of electron microscope

A technology of electron microscope and calibration device, which is applied to circuits, discharge tubes, electrical components, etc., can solve the problem of uncalibrated scanning electron microscope working distance, etc., and achieve the effect of simple structure, solving working distance and accurate calibration.

Active Publication Date: 2018-07-27
KYKY TECH
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The main purpose of the present invention is to provide a kind of calibration device of the working distance of electron microscope, to solve the problem of the working distance of scanning electron microscope without calibration device in the prior art

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Calibration device for working distance of electron microscope
  • Calibration device for working distance of electron microscope
  • Calibration device for working distance of electron microscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0023] Such as figure 1 and Figure 4 As shown, the calibration device of the working distance of the electron microscope of the present embodiment includes: a calibration substrate 10, the calibration substrate 10 is used to be installed on the sample stage of the electron microscope, and the calibration substrate 10 has an objective lens pole along its axial direction and towards the electron microscope. Several calibration planes 121 provided by the shoes and the positioning protrusions 11 protruding towar...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a calibrating device for a working distance of an electron microscope. The calibrating device comprises a calibration substrate (10) for mounting on a sample stage of the electron microscope, wherein the calibration substrate (10) has a plurality of calibration planes (121) disposed along the axial direction of the calibration substrate (10) and facing an objective lens pole shoe of the electron microscope and a positioning protrusion (11) which protrudes towards the objective lens pole shoe and realizes the positioning of the calibration substrate (10) through making contact and cooperation with the objective lens pole shoe. At least three calibration holes (131) having a focusing function are arranged on at least one of the calibration planes (121) of the plurality of calibration planes (121), and when the focus of the electron microscope is constant and all the calibration holes (131) are focused at the same time, the distance from the lower surface of the objective lens pole shoe to each calibration plane (121) is the working distance set by the electron microscope. The technical scheme of the present invention effectively solves the problem that no calibrating device in the prior art is used to scan the working distance of the electron microscope.

Description

technical field [0001] The invention relates to the technical field of instruments and meters, in particular to a calibration device for the working distance of an electron microscope. Background technique [0002] Currently, the working distance of a scanning electron microscope refers to the distance between the sample surface and the lower surface of the pole piece of the objective lens, which needs to be calibrated before the instrument leaves the factory. The calibration of the working distance is a very important part of the scanning electron microscope debugging and calibration process. However, there is no special calibration device to calibrate the working distance in the prior art. Contents of the invention [0003] The main purpose of the present invention is to provide a calibration device for the working distance of the electron microscope to solve the problem in the prior art that there is no calibration device for the working distance of the scanning electr...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/20
CPCH01J37/20
Inventor 孙占峰朱汉生
Owner KYKY TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com