A gas supply device and gas supply method for multi-working medium gas micro-flow calibration
A gas supply device and micro-flow technology, applied in the direction of gas/liquid distribution and storage, pipeline systems, mechanical equipment, etc., can solve the calibration deviation of the micro-flow of the working gas, the deviation of the micro-flow of the working gas and the thrust inversion flow, Inaccurate micro-flow of working fluid gas, etc., to achieve the effect of ensuring stability, preventing pollution, and facilitating adjustment
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[0028] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0029] The present invention provides a gas supply device for micro-flow calibration of multiple working fluid gases, the gas supply device includes a multiple working fluid gas circuit conversion system, a voltage stabilization system, a calibration system 26 and an evacuation unit. The multi-working medium gas circuit conversion system includes a gas storage system and an electrical circuit converter.
[0030] The gas storage system is used to provide a variety of calibration gases; the electrical circuit converter is used to ensure that the gas entering the pressure stabilizing system reaches the preset inlet pressure; the voltage stabilizing system is used to provide calibration gas reaching the preset outlet pressure; The gas supply is evacuated.
[0031] The gas storage system is connected to the pressure stabilizing system through pipelines, the el...
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