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Vacuum suction unit and vacuum suction stage

A vacuum adsorption and vacuum suction technology, which is applied in the direction of electrical components, printed circuits, manufacturing tools, etc., can solve the problems of wasting manpower, inconvenient operation of closing the vacuum suction slot, etc., and achieve the effect of automation

Active Publication Date: 2018-10-12
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In recent years, the sizes of the substrates adsorbed by the vacuum adsorption stages of the related art tend to be diversified. In order to cope with substrates of different sizes, tapes are usually used to close the temporarily unused vacuum suction grooves on the substrate stage, thereby closing the vacuum. The operation of the suction slot is inconvenient and wastes manpower

Method used

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  • Vacuum suction unit and vacuum suction stage
  • Vacuum suction unit and vacuum suction stage
  • Vacuum suction unit and vacuum suction stage

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Embodiment Construction

[0031] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0032] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "vertical", "horizontal", "top", "inner" and "outer" are based on The orientation or positional relationship shown in the drawings is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientat...

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Abstract

The invention discloses a vacuum adsorption unit and a vacuum adsorption carrier. The vacuum adsorption unit includes: a shell defining an air passage hole inside, and an upper stop surface and a lower stop surface are arranged in the air passage hole; The piston in the air passage hole, the outer peripheral wall of the piston slides and fits with the inner peripheral wall of the air passage hole; The pressure passage is configured such that the pressure relief passage is closed only when the piston moves to the lower abutment surface. The vacuum adsorption unit of the present invention can control the adsorption state of the vacuum adsorption unit according to whether the end of the air passage hole used for adsorption is covered or not, and the different air pressure differences generated on the upper and lower sides of the piston, so as to realize the smooth operation of the vacuum adsorption unit. The automation realizes the purpose of automatically closing the one end of the uncovered gas passage hole used for adsorption.

Description

technical field [0001] The invention relates to the field of vacuum adsorption, in particular to a vacuum adsorption unit and a vacuum adsorption carrier. Background technique [0002] In recent years, the sizes of the substrates adsorbed by the vacuum adsorption stages of the related art tend to be diversified. In order to cope with substrates of different sizes, tapes are usually used to close the temporarily unused vacuum suction grooves on the substrate stage, thereby closing the vacuum. The operation of the suction slot is inconvenient and wastes manpower. Contents of the invention [0003] The present invention aims to solve at least one of the technical problems existing in the prior art. For this reason, the present invention proposes a vacuum adsorption unit, which can control the adsorption state of the vacuum adsorption unit according to the different air pressure differences generated on the upper and lower sides of the piston according to whether the end of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25B11/00H05K3/00
CPCB25B11/005H05K3/00H05K2203/0195H01L21/67393H01L21/67383
Inventor 郑汉博李丽闫俊伟冯长海
Owner BOE TECH GRP CO LTD
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