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Tubular pleated hood

A cylindrical, wrinkled cover technology, applied in abrasive surface adjustment devices, grinding machine tools, manufacturing tools, etc., can solve the problem of easy damage of the cylindrical wrinkled cover, and achieve the effect of preventing damage

Active Publication Date: 2020-07-31
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the nested state is maintained and the cylindrical bellows follow the upward or horizontal movement of the polishing pad, there is a problem that the cylindrical bellows are easily damaged due to friction or hooking of multiple rings.

Method used

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  • Tubular pleated hood
  • Tubular pleated hood
  • Tubular pleated hood

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0018] Hereinafter, a grinding and polishing apparatus having a cylindrical bellows according to the present embodiment will be described with reference to the drawings. figure 1 It is a perspective view of the grinding and polishing apparatus of this embodiment. In addition, the cylindrical bellows can be applied to a processing device having a processing member that moves up, down, left, and right, and is not limited to figure 1 Grinding device shown. In addition, in figure 1 In , for convenience of description, descriptions of wire members and the like of the cylindrical bellows are omitted.

[0019] Such as figure 1 As shown, the grinding and polishing apparatus 1 is a fully automatic type processing apparatus, and is configured to be able to perform carrying-in processing, rough grinding processing, finish grinding processing, grinding processing, cleaning processing, and carrying-out processing on the wafer W fully automatically. a series of tasks. The wafer W is fo...

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PUM

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Abstract

A cylindrical bellows are provided to prevent breakage of the cylindrical bellows due to the nested state of the rings. A cylindrical pleat cover (91), which deforms following the movement of a processing member, the cylindrical pleat cover (91) has: a plurality of rings (96); a cylindrical pleat cloth (97), which holds the plurality of rings connected in parallel; a plurality of protrusions (98), which protrude outward from each peak of the crepe cloth; and a thread member (101), which passes through a hole (99) formed in each protrusion, and the cylindrical pleat The cover (91) is configured to guide the movement of each protruding portion by a wire member, thereby preventing a plurality of reinforcing rings from being nested.

Description

technical field [0001] The present invention relates to a cylindrical corrugated cover that covers a processing area and deforms following movement of a polishing pad. Background technique [0002] In the polishing apparatus, a wafer is held on a chuck table, and a polishing pad is pressed against the wafer to perform polishing. In the polishing process, the polishing pad moves horizontally (in the left-right direction) parallel to the front surface of the wafer while the horizontally rotating polishing pad is pressed against the wafer. After the polishing is completed, the polishing pad moves away from the wafer to the original position. That is, during the polishing process, the polishing pad is pushed against the wafer from above to perform polishing while moving horizontally, and at the end of polishing, the polishing pad returns to the original position by moving horizontally after rising. [0003] In addition, in the polishing apparatus, when the polishing process is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B53/017
CPCB24B53/017H01L21/304H01L21/30625H01L21/67092H01L21/67219B24B37/04B24B7/24
Inventor 松山敏文诹访野纯藤泽晋一
Owner DISCO CORP