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Projection optical system, exposure apparatus, and device manufacturing method

A cam device, cam technology, applied in the direction of assembly machine, transmission, steering control, etc.

Active Publication Date: 2017-08-01
NSK LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the case of the structure of the invention described in Japanese Patent Application Laid-Open No. 2000-53001, even if one of the cams is wrongly selected, it is difficult to judge whether it is a wrong combination in the state before assembly.

Method used

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  • Projection optical system, exposure apparatus, and device manufacturing method
  • Projection optical system, exposure apparatus, and device manufacturing method
  • Projection optical system, exposure apparatus, and device manufacturing method

Examples

Experimental program
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Embodiment Construction

[0057] Figure 1 to Figure 4 It is an example showing embodiment of this invention. The steering gear of this example is loaded into and used to adjust the steering wheel 1 accordingly to the driver's physique and driving posture (refer to Figure 6 ), the steering device is provided with: a steering column 6a, a steering spindle 5a, a support bracket 15a, a displacement bracket 14a, a cam device 27a, a pair of oblong holes 18a for tilting and a pair of through holes 19a.

[0058] The steering column 6a is driven by the tilt shaft 13 (refer to Figure 6 ) is supported so as to be capable of swinging displacement, and the tilt shaft 13 fixes the front end portion to the vehicle body 12 in a state arranged in the width direction. The steering main shaft 5a is rotatably supported inside the steering column 6a, and the steering wheel 1 is fixed to the rear end portion of the steering main shaft 5a.

[0059] The support bracket 15 a is fixed to the vehicle body 12 . The middle pa...

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PUM

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Abstract

There is provided a projection optical system that projects an image of an object onto an image plane. The projection optical system includes an imaging optical system including a first concave mirror, a convex mirror, and a second concave mirror; an optical member having a first reflecting surface and a second reflecting surface each redirecting an optical path; and a supporting member that supports the convex mirror. The first reflecting surface, the first concave mirror, the convex mirror, the second concave mirror, and the second reflecting surface are provided in that order in a direction of travel of light from an object plane. The optical member has a through hole having an opening on a side facing the convex mirror. The supporting member extends through the through hole and from the opening to the convex mirror.

Description

technical field [0001] The present invention relates to a cam device, which is incorporated and used, for example, in a steering wheel position adjusting device for making the height position of the steering wheel adjustable. Background technique [0002] Figure 6 Represents a conventionally known steering device for automobiles. The steering wheel 1 is supported and fixed to the rear end portion of a steering main shaft 5 , and the steering main shaft 5 is rotatably supported by the steering column 6 in a state where the cylindrical steering column 6 is inserted in the axial direction. The front end of the steering main shaft 5 is connected to the rear end of an intermediate main shaft 8 via a universal joint 7 , and the front end of the intermediate main shaft 8 is connected to the input shaft 3 via another universal joint 9 . If the driver operates the steering wheel 1, the rotation of the steering wheel 1 is transmitted to the input shaft 3 of the steering gear unit 2 ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16H25/12B23P21/00B62D1/184
CPCF16H25/186B62D1/184B23P15/00B23P2700/50B62D1/187
Inventor 真庭高弘
Owner NSK LTD