Silicon-based MEMS array loudspeaker

Abstract

The invention relates to a silicon-based MEMS array loudspeaker. The silicon-based MEMS array loudspeaker comprises a substrate and multiple MEMS micro-acoustic units; the multiple MEMS micro-acoustic units are arrayed on the substrate; each MEMS micro-acoustic unit comprises a vibrating diaphragm, an upper insulation sheet, a lower insulation sheet, an upper conductive plate and a lower conductive plate; the vibrating diaphragm is used as an intermediate electrode; the upper insulation sheet and the lower insulation sheet are connected to the upper and lower surfaces of the vibrating diaphragm; the upper conductive plate is used as an upper electrode; the lower conductive plate is used as a lower electrode; the upper conductive plate is installed on the upper insulation sheet; the lower conductive plate is installed on the lower insulation sheet; the upper insulation sheet and the lower insulation sheet are each provided with a centre hole; the upper conductive plate is provided with multiple pronunciation holes communicated with the centre hole; and the lower conductive plate is provided with a ventilation hole communicated with the centre hole. The silicon-based MEMS array loudspeaker disclosed by the invention has the characteristics of being thin in thickness, good in sound quality and the like.

Description

technical field [0001] The invention relates to the technical field of loudspeakers, in particular to a silicon-based MEMS array loudspeaker. Background technique [0002] At present, the speakers on the market are usually moving coil speakers, moving iron speakers, piezoelectric speakers and electrostatic speakers. However, the market demands for thinner speakers and clearer sound quality. The entire electronics industry has digitized most of its products. and miniaturization, the existing loudspeakers can no longer meet the needs of the electronics industry. Contents of the invention [0003] In view of the above technical problems, the present invention provides a silicon-based MEMS array loudspeaker that solves the above problems. [0004] Realize the technical scheme of the present invention as follows: [0005] A silicon-based MEMS array speaker, comprising a substrate, a plurality of MEMS micro-acoustic units, and a plurality of MEMS micro-acoustic units arrayed o...

AI Technical Summary

Problems solved by technology

[0002] At present, the speakers on the market are usually moving coil speakers, moving iron speakers, piezoelectric speakers and electrostatic speakers. However, the market demands for thinner speakers and clearer sound quality. The entire electronics industry has digitized most of its products. and miniaturization, the existing loudspeakers can no longer meet the needs of the electronics industry

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