Mother-son crucible device for evaporation composite metal coating

A composite metal film and crucible technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve the problems of uneven film layer, different evaporation range and so on

Active Publication Date: 2017-10-20
FOSHAN NANHAI JINGDINGTAI MACHINERY EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since each crucible has a certain effective evaporation range, the evaporation ranges o

Method used

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  • Mother-son crucible device for evaporation composite metal coating
  • Mother-son crucible device for evaporation composite metal coating

Examples

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Example Embodiment

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0016] like Figure 1-2 As shown in the figure, a mother-child crucible device for vapor deposition of a composite metal film layer comprises a base 1, and is characterized in that: a mother crucible 2 and four child-crucible modules 3 are arranged on the base 1; A mother crucible installation groove 4 is reserved, and the mother crucible 2 is installed in the mother crucible installation groove 4; the four sub-crucible modules 3 are evenly distributed on the base around the outer contour of the mother crucible.

[0017] Each sub-crucible module 3 includes a sub-crucible base 5, a sub-crucible 6, an electron gun 7 and a driving cylinder 8; the sub-crucible base 5 is hinged on the surface of the base 1; The push rod of the cylinder 8 is connected to the bottom of the child crucible 6; the child crucible 6 can be turned over the outer circumference of the ...

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Abstract

The invention develops a mother-son crucible device for an evaporation composite metal coating. The mother-son crucible device comprises a base. The mother-son crucible device is characterized in that a mother crucible and a plurality of son crucible modules are arranged on the base, a mother crucible mounting groove is reserved in the base, and the mother crucible is mounted in the mother crucible mounting groove; the multiple son crucible modules are evenly distributed on the base around the outer contour of the mother crucible, the son crucible modules comprise son crucible bases, son crucibles, electronic guns and driving cylinders, and the son crucible bases are hinged to the surface of the base; and the son crucibles and the electronic guns are both fixed to the surfaces of the son crucible bases, push rods of the driving cylinders are connected to the bottoms of the son crucibles, the son crucibles can overturn on the position above the periphery of the mother crucible relative to the base, and each drainage trough inclined to the surface of the base is formed between the corresponding son crucible and the mother crucible. The mother-son crucible device for the evaporation composite metal coating has the advantages that preparation is efficient, the coating is even, and the manpower cost is low.

Description

technical field [0001] The invention relates to a device for preparing a metal film layer by evaporation, in particular to a mother-child crucible device for evaporating a composite metal film layer. Background technique [0002] In the field of material surface treatment applications, evaporation coating is a commonly used method to prepare metal film layers. The usual evaporation coating is to put an evaporation material in a crucible, and the evaporation is controlled by an electron gun. In order to obtain different metals + alloy materials + different Multilayer composite coatings of metals and the like require multiple crucibles and multiple electron guns. Since each crucible has a certain effective evaporation range, multiple crucibles have different evaporation ranges, which will cause inhomogeneity of the film layer. [0003] For this reason, it is necessary to develop a new type of equipment for preparing metal film layers by crucible electron gun evaporation. Co...

Claims

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Application Information

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IPC IPC(8): C23C14/24
CPCC23C14/243
Inventor 应世强尹忠乐李术杰
Owner FOSHAN NANHAI JINGDINGTAI MACHINERY EQUIP CO LTD
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