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Glucose quantitative test sensor and preparation method based on microwave patch resonator

A chip resonator and resonator technology, applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems that limit the wide application of glucose biosensors, the accuracy and reliability of the results cannot be guaranteed, and achieve the benefits of commercial The effects of popularizing and applying, achieving reusability, and solving inaccuracy problems

Active Publication Date: 2019-04-23
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the existing glucose solution detection technology is often limited by the amount, shape, and test location of the solution, the accuracy and reliability of the results cannot be guaranteed, which largely limits the wide application of glucose biosensors.

Method used

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  • Glucose quantitative test sensor and preparation method based on microwave patch resonator
  • Glucose quantitative test sensor and preparation method based on microwave patch resonator
  • Glucose quantitative test sensor and preparation method based on microwave patch resonator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Such as figure 1 and 4 As shown, a method of making a glucose biosensor based on a microwave patch resonator with a wall structure on the front is as follows:

[0051] (1) First use glass, quartz, silicon and other semiconductor substrates, and use isopropylamine solution to clean once, and then use deionized water to clean twice to ensure that the surface is clean and free of impurities;

[0052] (2) Deposit a layer of silicon dioxide or silicon nitride passivation layer with a thickness of 50-200 nanometers on the semiconductor substrate by using the low-pressure chemical vapor deposition method, so as to obtain a flatter surface for subsequent processing;

[0053] (3) Use the sputtering method to grow a layer of titanium or chromium with a thickness of about 20-50 nanometers as the first seed metal layer, and then use the sputtering method to grow a layer of gold with a thickness of about 30-100 nanometers as the second layer A seed metal layer to promote adhesion ...

Embodiment 2

[0065] Such as Figure 2-3 , as shown in 5-6, a glucose biosensor based on a microwave patch resonator with a groove structure on the back is fabricated as follows:

[0066] (1) First use glass, quartz, silicon and other semiconductor substrates, and use isopropylamine solution to clean once, and then use deionized water to clean twice to ensure that the surface is clean and free of impurities;

[0067] (2) Deposit a layer of silicon dioxide or silicon nitride passivation layer with a thickness of 50-200 nanometers on the semiconductor substrate by using the low-pressure chemical vapor deposition method, so as to obtain a flatter surface for subsequent processing;

[0068] (3) Use the sputtering method to grow a layer of titanium or chromium with a thickness of about 20-50 nanometers as the first seed metal layer, and then use the sputtering method to grow a layer of gold with a thickness of about 30-100 nanometers as the second layer A seed metal layer to promote adhesion be...

Embodiment 3

[0087] Detection of glucose solution concentration

[0088](1) Using HFSS v16 software on the computer, two kinds of chip resonators with strict specifications based on the "wall" structure on the front of the substrate and the "groove" structure on the back of the substrate were designed and simulated. figure 1 and figure 2 They are patch resonators based on the front SU-8 "wall" structure and the back "groove" structure;

[0089] (2) The frequency response of the patch resonator should have a high quality factor, and the size of the patch resonator should be slightly smaller than the "wall" and "groove" structures, so as to ensure that the test solution drips into the "wall" and "groove" "The structure can completely cover the patch sensor, touch and affect the electric field of the patch resonator, and finally change the frequency and reflection coefficient of the patch resonator to characterize the concentration of glucose;

[0090] (3) Using micro-nano technology to co...

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Abstract

The invention discloses a glucose quantitative testing sensor based on a microwave patch resonator and a preparation method. The sensor solves the problem that a glucose concentration is inaccurate when a microwave device measures the glucose concentration. The method comprises the following steps: firstly manufacturing the patch resonator and a sample patch of a coplanar waveguide feeder on the front side of a semi-conductive substrate, and then manufacturing a fence structure of SU-8 light resistance adhesive on the front side of the substrate containing the sample patch, or manufacturing a groove structure on the back side of the substrate containing the sample patch. The sensor adopts resonant frequency and reflection coefficient as detection parameters, realizes the characteristics that the detection reaction time is not more than one second, the sensitivity is high and the sensor can be reused, and overcomes the disadvantage that generally biosensors based on microwave devices cannot perform quantitative detection.

Description

technical field [0001] The invention relates to a glucose quantitative test sensor based on a microwave patch resonator and a preparation method. Background technique [0002] Diabetes is a metabolic disease, which is characterized by the patient's blood sugar higher than the standard value for a long time. The number of people with diabetes in the world was 124 million in 1997. In 2014, an estimated 422 million adults worldwide had diabetes. Due to diabetes The number of patients is increasing rapidly, and its complications will cause financial burden and decrease the quality of life, so the pre-diabetes detection has become particularly important. As a commonly used pre-test solution, glucose solution is of great significance for the detection of its concentration. Currently, there are three commonly used detection methods for glucose concentration: chemical methods based on biological enzymes; optical methods based on optical devices; methods based on microwave devices. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/22
CPCG01N27/221
Inventor 王琮强天
Owner HARBIN INST OF TECH
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