A Correction Device for Micro Displacement Error

Abstract

The invention relates to a correction device for a micro displacement error. The device comprises a measurement part, a micro-motion part and a correction mechanism. The micro-motion part comprises a displacement input unit, a workpiece platform, a support unit, a connecting unit, a speed changing unit and a first buffer unit. The speed changing unit conducts speed changing on the input displacement amount and then outputs the displacement amount; the first buffer unit is arranged between the speed changing unit and the workpiece platform, the input end of the first buffer unit is connected with the output end of the speed changing unit, the output end of the first buffer unit is connected with the input end of the workpiece platform, the first buffer unit is provided with a buffer and adsorption part and used for buffering the acting force, acting on the workpiece platform, of the speed changing unit and reducing the displacement mount of the workpiece platform, and the buffer and adsorption part is connected with the workpiece platform. The displacement input unit sets input displacement through the correction mechanism, and the displacement amount of the workpiece platform is equal to the manufacturing accumulative error and the temperature accumulative error of workpieces.

Description

technical field [0001] The invention relates to the field of machinery, in particular to a correction device for micro displacement errors. Background technique [0002] The micro-displacement device is a kind of device that enables a certain part or part of mechanical equipment to move to a specific position or perform a specific micro-movement precisely and micro-quantity. Commonly used micro-displacement devices can be divided into mechanical types according to their different transmission principles. , heat variable form, magnetostrictive type, elastic variable form, piezoelectric type, etc. [0003] When using a long grating to measure the length, it works by using the moiré fringe effect produced when two gratings with the same pitch are superimposed. When the lines of the two gratings are not parallel but inclined at a small angle, light and dark moiré fringes will be formed when the light passes through. The component receives, counts, displays, and accurately dete...

AI Technical Summary

Problems solved by technology

However, the processing accuracy of the line spacing of the grating is limited, and it is impossible to achieve zero error, so the measurement must have errors due to processing accuracy and temperature.

[0005] The disadvantages of the length measurement method in the prior art are: the measurement accuracy is directly determined by the manufacturing accuracy of the grating, and the ambient temperature requirement is high, so it is difficult to apply to precision and ultra-precision equipment

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