Method for controlling an ultrasound motor and corresponding control arrangement

A control mechanism, ultrasonic technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, fluid using vibration, etc. Problems such as the complexity of motor manufacturing technology

Active Publication Date: 2017-12-05
PHYSIK INSTR PI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Since not only the friction rails but also the friction elements are made of extremely hard materials, this complicates the manufacturing technology of ultrasonic motors and makes them more expensive
As a result, high-precision drive systems equipped with ultrasonic motors and built into equipment with low and extremely low moving speeds also become more complex and expensive

Method used

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  • Method for controlling an ultrasound motor and corresponding control arrangement
  • Method for controlling an ultrasound motor and corresponding control arrangement
  • Method for controlling an ultrasound motor and corresponding control arrangement

Examples

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Embodiment Construction

[0034] figure 1 A possible embodiment of an ultrasonic motor for applying the method according to the invention is shown. Ultrasonic motor M usually has:

[0035] - Ultrasonic actuator 1 having:

[0036] - at least one group of two generators 3, 4 each for generating sound waves, in particular ultrasonic waves, with a control device electrically connected to the generators 3, 4 for switching the first voltage U1 and / or the second A voltage U2 is applied to each of the generators 3, 4, said first voltage U1 being defined by a respective frequency and a respective amplitude, said second voltage U2 being defined by a respective frequency and a respective amplitude;

[0037]- a friction element 7 arranged between the generators 3, 4 of each group of generators 3, 4 and coupled with each of the generators 3, 4 of such a group, so as to be based on using the control of the first voltage U1 and / or the second voltage U2 to control the movement of the friction element 7 by mechanica...

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Abstract

The invention relates to a method for controlling an ultrasound motor, comprising the following steps: beginning with a starting speed or a starting position of the driven element, setting the frequency fu of the electrical excitation voltage in such a way that the frequency fu is equal to the mechanical resonant frequency frm of the ultrasound actuator is or close thereto; changing the frequency fu of the electrical excitation voltage using the signal of the motion sensor and / or of the position sensor to the anti-resonant frequency fa of the ultrasound actuator until a final speed or a final position of the driven element is reached; adjusting the final speed or the end position of the driven element with a predetermined precision by means of anti-phase frequency change; and a corresponding control arrangement for an ultrasound motor, the ultrasound motor comprising an ultrasound actuator (1) having at least two generators (3, 4) for acoustic waves, a driven element (10) and a generator for an electrical excitation voltage, wherein the generator for an electrical excitation voltage has a frequency regulation, of which the output is connected to a power amplifier and the input is connected to a controller for the speed of movement or for the position of the driven element.

Description

technical field [0001] The invention relates to a control method of an ultrasonic motor and a corresponding control mechanism. The method and the corresponding control mechanism according to the invention are provided for ultrasonic motors or applications thereof in which precise movement speeds and high positioning accuracy at very low movement speeds are required. [0002] The invention finds corresponding application in the field of microscope stages or adjustment stages, optical and laser focusing systems, generally in the field of positioning systems. Background technique [0003] The control method and control mechanism of the ultrasonic motor are known (for example EP2095441B1, US8604665B2), wherein the ultrasonic actuator of the ultrasonic motor works with its mechanical resonance frequency, and the speed is adjusted by changing the amplitude of the excitation voltage at the mechanical resonance frequency. control or position control. [0004] A disadvantage of thi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/00H02N2/06H02N2/14
CPCH02N2/008H02N2/062H02N2/142B06B1/0648
Inventor 瓦拉迪米尔·维施纽斯基阿列克谢·维施纽斯基
Owner PHYSIK INSTR PI
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