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Thermal evaporator

An evaporation machine and evaporation technology, applied in the field of evaporation machines, can solve the problem of limited evaporation range and achieve the effect of solving the limitation of evaporation area

Inactive Publication Date: 2017-12-15
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention provides an evaporation machine, which is used for regional evaporation to solve the technical problem that the evaporation range is limited

Method used

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Embodiment Construction

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0020] see figure 1 , the present invention provides an evaporation machine for evaporation of a glass substrate 1, the evaporation machine includes a vacuum evaporation chamber 2 and an evaporation source 3 accommodated in the vacuum evaporation chamber 2, a metal mask Diaphragm 4, moving part 5 and bracket 6, described bracket 6 is installed on described moving part 5, and described metal mask plate 4 is supported under described bracket 6 and is po...

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PUM

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Abstract

The invention provides a thermal evaporator for thermally evaporating a glass substrate. The thermal evaporator comprises a vacuum thermal evaporating chamber, a thermal evaporating source, a metal mask plate, a moving prat and a bracket, wherein the thermal evaporating source, the metal mask plate, the moving part and the bracket are stored in the vacuum thermal evaporating chamber; the bracket is mounted on the moving part; the metal mask plate is supported below the bracket and positioned above the thermal evaporating source, and the metal mask plate can move relative to the bracket; the glass substrate is attached to the surface, facing the metal ask plate, of the bracket; and a gap is formed between the glass substrate and the metal mask plate; the glass substrate comprises at least two thermal evaporating areas; the bracket is driven by the moving part to move, and accordingly the glass substrate is driven to move relative to the metal mask plate, and thus each thermal evaporating area of the glass substrate is corresponding to the position of the metal mask plate. According to the thermal evaporator, the technical problem of the limitation of a thermal evaporating range of the glass substrate is solved by an area-based evaporating manner.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an evaporation machine. Background technique [0002] At present, as a process method, the evaporation process is mainly used in the production of the organic layer and motor layer of OLED (Organic Light-Emitting Diode, organic light-emitting diode), which has the characteristics of simple production process, high production precision, and small flatness of the film. However, the current evaporation technology is to evaporate a substrate, and the range and quality of evaporation have certain limitations. For example, it is difficult to make products larger than the existing evaporation products. Contents of the invention [0003] The invention provides an evaporating machine, which is used for sub-area evaporating to solve the technical problem that the evaporating range is limited. [0004] The invention provides an evaporation machine, which is used for evaporation of glass...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/04C23C14/50
CPCC23C14/042C23C14/24C23C14/50
Inventor 蔡丰豪
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD