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Mask plate and preparation method thereof and evaporation plating method with same

A mask and mask technology, which is applied in the fields of evaporation, mask and its preparation, can solve the problems of easy wrinkles of the mask and large droop of the mask, so as to improve the shadow effect and the risk of color mixing, The effect of reducing the area and improving the quality of vapor deposition

Pending Publication Date: 2020-07-10
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the problem that the mask plate sags a lot in evaporation of a large-size display panel, and the mask plate is more prone to wrinkle during the net stretching process, the invention provides a mask plate, its preparation method and an evaporation method using it

Method used

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  • Mask plate and preparation method thereof and evaporation plating method with same
  • Mask plate and preparation method thereof and evaporation plating method with same
  • Mask plate and preparation method thereof and evaporation plating method with same

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Embodiment Construction

[0029] In order to enable those skilled in the art to better understand the technical solution of the present invention, a mask plate of the present invention, its preparation method and the evaporation method using it will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0030] like figure 1 As shown, at present, the traditional two-side stretching method is still used for the opening of the large-size metal mask 8. First, the metal mask 8 is placed on the machine (stage), and the CCD (charge coupled device, charge coupled device) After the camera is aligned, use grippers to clamp both ends of the metal mask 8, and then apply a reaction force to the frame 1 (frame) along the direction of the net, and then the grippers move the metal mask 8 to frame 1 Above and apply a tensile force, the CCD camera checks the pixel position accuracy after alignment, and then completes the welding process of the metal mask 8 and the ...

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Abstract

The invention provides a mask plate and a preparation method thereof and an evaporation plating method with the same. The mask plate comprises a frame and mask nets, the frame comprises a side frame and at least one bracket connected with the side frame, and an area formed by the enclosing of the side frame is divided into at least two netting areas through the brackets; at least two mask nets correspondingly net corresponding to each netting area, and the peripheral edges of the mask nets are correspondingly and fixedly connected with the frame forming the netting areas by enclosing. According to the mask plate, the area formed by enclosing of the side frame is divided into at least two netting areas through the brackets, the area of the netting area of the mask plate can be reduced, thusthe risk of the mask net wrinkling in the process of netting is reduced, the netting of four sides of the mask nets can be achieved, the phenomenon of the mask net sagging due to the excessive gravity can be greatly improved through netting of the four sides, the evaporation plating accuracy adopting the mask plate is improved, thus the shadow effect and color mixing risk are improved, and the evaporation plating accuracy adopting the mask plate is improved.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a mask plate, a preparation method thereof and an evaporation method using the same. Background technique [0002] Organic electroluminescent devices (OLED, Organic Light-Emitting Diode) have been widely used in mobile phones, car displays, cameras, etc. Small and medium-sized panel displays are likely to replace traditional liquid crystal displays and become a recognized next-generation screen display technology. [0003] Most of the organic light-emitting functional layers in OLEDs use high-vacuum evaporation technology. The principle is to use a fine metal mask (Fine Metal Mask, FMM) to cover the glass substrate, and then heat the organic material to volatilize, and the volatilized organic material passes through The fine openings on the mask are deposited on the corresponding positions on the glass substrate. Therefore, in order to achieve a high-precision disp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24C23C14/12
CPCC23C14/042C23C14/12C23C14/24
Inventor 熊自阳赖韦霖鲍建东
Owner BOE TECH GRP CO LTD