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vacuum control valve

A vacuum control valve, fine control technology, applied in the direction of valve lift, valve device, valve details, etc., can solve the problem that fine adjustment is not feasible, and achieve the effect of avoiding pressure fluctuations

Active Publication Date: 2020-09-15
VAT HLDG AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, fine tuning in the very low pressure range is hardly feasible or impossible

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0051] Figure 1aA schematic view of a cross section through an embodiment of the vacuum valve 10 according to the invention is shown in the open position. The valve 10 comprises a valve disk 11 as a closing element and a valve seat 12 opposite the valve disk 11 . The valve seat 12 extends around the valve opening 16 and thus delimits the valve opening 16 . The valve disc 11 is arranged to be movable relative to the valve seat 12 providing mobility at least along an opening axis A defined by the opening 16 or along an axis B passing through the second sealing surface 14 The alignment is limited. The axes A and B coincide in the position shown due to the parallel alignment of the disc 11 or its sealing surface 14 relative to the seat 12 .

[0052] As an alternative to this, the valve disk 11 can also be aligned in an open position not parallel but at an angle (inclined) relative to the valve seat 12 .

[0053] Both the valve disc 11 and the valve seat 12 have sealing surface...

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PUM

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Abstract

This invention relates to vacuum control valves. The vacuum control valve has a valve seat including a valve opening defining an opening axis and a first sealing surface surrounding the opening and defining a first sealing plane; a valve disc with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane The first coupling element is connected to the valve disc and includes a receiving device for providing controlled guidance of the valve disc; the drive unit is coupled with the first coupling element and is configured to enable the valve disc to be adjusted from the open position to the closed position and back , in the open position the valve disc and the valve seat exist in a non-contact manner with each other, in the closed position the second sealing surface is pressed against the first sealing surface by means of the seal. The drive unit and the valve disc are constructed and interacted so that the valve disc can be adjusted to a finely controlled position wherein the valve disc is tilted in a defined manner relative to the valve seat so that the first and second sealing planes enclose a defined angle and the seals are sufficiently abutted One sealing surface and only partially abutting the other.

Description

technical field [0001] The invention relates to a vacuum control valve with a valve disk and a guide for the valve disk in at least three stages. Background technique [0002] In general, different embodiments of vacuum valves are known from the prior art for closing off a flow path through an opening formed in a valve housing in a substantially gas-tight manner. [0003] In particular, vacuum slide valves must be used in the field of IC and semiconductor manufacturing which takes place in a protected atmosphere free from contaminating particles as much as possible. For example, in a production plant for semiconductor wafers or liquid crystal substrates, highly sensitive semiconductor or liquid crystal elements are passed sequentially through several process chambers, wherein the semiconductor elements located inside the process chambers are processed in each case by means of a processing device. During the handling process inside the process chamber and during the transpor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K31/04F16K1/36F16K1/32
CPCF16K1/32F16K1/36F16K31/04F16K1/24F16K51/02F16K1/42F16K27/02F16K31/047B23K20/122
Inventor M·内策丹尼尔·塞茨H·松德雷格
Owner VAT HLDG AG