Trace moisture standard generation system in gas
A technology for generating systems and moisture, applied in measuring devices, analytical materials, instruments, etc., can solve problems such as inability to calibrate instruments, and achieve the effect of improving the accuracy and accuracy of calibration
Active Publication Date: 2020-05-12
NAT INST OF METROLOGY CHINA
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Problems solved by technology
The current domestic moisture standard generating device can produce a moisture standard with a content higher than 1 μmol / mol, but the dew point meter for measuring trace moisture usually has a measurement range below 1 μmol / mol, and the current moisture standard generating device cannot cover this 1 μmol / mol The range below makes it impossible to calibrate such instruments
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[0024] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.
[0025] Such as figure 1 As shown, the present invention provides a trace moisture standard generating system in gas, which includes a gas pipeline 1, a first branch 2, a second branch 3, a third branch 4, a dilution pipeline, and a branch pipeline 5 And vent pipeline 6, wherein:
[0026] One end of the gas pipeline 1 is connected to a high-purity gas source 7 containing high-purity gas. Specifically, the high-purity gas refers to rare gases such as high-purity nitrogen, and high-purity nitrogen is preferred in this embodiment. The above-mentioned high-purity gas source 7 may be a plurality of high-purity gas tanks, and the multiple high-purity gas tanks are connected to one end of the gas pipeline 1 through pipelines.
[0027] On the above-mentioned gas pipeline 1, a pressure reducing valve 8, a p...
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The invention belongs to the technical field of trace water standard formation, and discloses a gas trace water standard generating system including a gas pipeline, a first branch, a second branch andat least one dilution pipeline. One end of the gas pipeline is connected with a highly pure gas source, the gas pipeline is provided with a pressure relief valve, a purifier and a pressure maintaining valve. The first branch is communicated with one end of the gas pipeline, and is provided with a first mass flow controller, a moisture detection device and a first flow meter. The second branch isconnected with one end of the gas pipeline, and is provided with a second mass flow controller, a magnetic suspension balance and a first counterbalance valve. One end of the dilution pipeline is communicated with the second branch, the other end of the dilution pipeline is communicated with the two branch pipes, one branch pipe is communicated with the first branch, the other branch pipe is provided with a second flow meter, and the dilution pipeline is provided with a third mass flow controller. The gas trace water standard generating system can generate a trace water standard with the moisture content below 1 mu mol / mol to calibrate a precise dew point instrument or a micro moisture meter and improve the accuracy of calibration.
Description
technical field [0001] The invention relates to the technical field of trace moisture standard generation, in particular to a trace moisture standard generation system in gas. Background technique [0002] In today's gas industry chain, ultra-high-purity gases are more and more widely used, especially in the electronic information industry. It is an indispensable raw material for industrial production and is used in thin film, etching, doping, vapor deposition, diffusion and other processes. In addition, ultra-high-purity gases also have certain applications in nuclear industry, national defense and other fields. With the rapid development of my country's high-tech industry, the demand for ultra-high-purity gas quality is getting higher and higher, especially for the detection of micro-trace impurities in ultra-high-purity gases. In the analysis of trace impurities, trace moisture analysis It is the most difficult to analyze in all gas analysis, but also one of the most imp...
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IPC IPC(8): G01N33/00
Inventor 胡树国
Owner NAT INST OF METROLOGY CHINA