Two-stage piezo-driven micro-nano positioning platform
A piezoelectric drive, micro-nano positioning technology, applied in the directions of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc. Problems such as low speed and insufficient positioning accuracy to achieve high positioning accuracy, simple and reliable structure, and quality reduction
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[0030] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0031] like figure 1 and figure 2 As shown, a two-stage piezoelectric driven micro-nano positioning platform includes a base 1, a first-stage motion platform 2, a first-stage motion platform compliance mechanism 5, a second-stage motion platform 3, a second-stage motion platform motion guiding mechanism 6, and a press Electroceramic driver 4;
[0032] There are a plurality of positioning platform fixing holes 7 on the base 1, which are used to fix the positioning platform on the shock-isolation table;
[0033] The primary motion platform 2 is assembled in the base 1 through the primary motion platform compliance mechanism 5 , the primary motion platform compliance mechanism 5 includes a primary motion platform displacement amplifying mechanism 51 and a primary motion platform motion guiding mechanism 52 .
[0034] In this embodiment, the primary motion pl...
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