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Two-stage piezo-driven micro-nano positioning platform

A piezoelectric drive, micro-nano positioning technology, applied in the directions of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc. Problems such as low speed and insufficient positioning accuracy to achieve high positioning accuracy, simple and reliable structure, and quality reduction

Active Publication Date: 2020-10-27
HANGZHOU DIANZI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a single-degree-of-freedom large-stroke micro-nano positioning platform with a two-stage positioning structure, driven by a piezoelectric ceramic driver, and a compact structure, which solves the problem of low positioning speed and positioning accuracy of the current large-stroke micro-nano positioning platform. and large issues

Method used

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  • Two-stage piezo-driven micro-nano positioning platform
  • Two-stage piezo-driven micro-nano positioning platform
  • Two-stage piezo-driven micro-nano positioning platform

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Embodiment Construction

[0030] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0031] like figure 1 and figure 2 As shown, a two-stage piezoelectric driven micro-nano positioning platform includes a base 1, a first-stage motion platform 2, a first-stage motion platform compliance mechanism 5, a second-stage motion platform 3, a second-stage motion platform motion guiding mechanism 6, and a press Electroceramic driver 4;

[0032] There are a plurality of positioning platform fixing holes 7 on the base 1, which are used to fix the positioning platform on the shock-isolation table;

[0033] The primary motion platform 2 is assembled in the base 1 through the primary motion platform compliance mechanism 5 , the primary motion platform compliance mechanism 5 includes a primary motion platform displacement amplifying mechanism 51 and a primary motion platform motion guiding mechanism 52 .

[0034] In this embodiment, the primary motion pl...

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Abstract

The invention discloses a two-level piezoelectric driving micro-nano positioning platform. The two-level piezoelectric driving micro-nano positioning platform comprises a base, a first-level motion platform, a first-level motion platform smoothening mechanism, a second-level motion platform, a second-level motion platform motion guiding mechanism and a piezoelectric ceramic driver. The first-levelmotion platform is assembled in the base through the first-level motion platform smoothening mechanism. The first-level motion platform smoothening mechanism comprises a first-level motion platform displacement amplification mechanism and a first-level motion platform motion guiding mechanism. The second-level motion platform is assembled in the first-level motion platform through the second-level motion platform motion guiding mechanism. The piezoelectric ceramic driver comprises a first-level motion platform piezoelectric ceramic driver body and a second-level motion platform piezoelectricceramic driver body which drive the first-level motion platform and the second-level motion platform correspondingly.

Description

technical field [0001] The invention relates to the field of micro-nano precision positioning, in particular to a two-stage piezoelectric-driven large-stroke micro-nano positioning platform. Background technique [0002] With the rapid development of science and technology such as microelectronics engineering, precision machining and ultra-precision machining technology, biomedical engineering, and precision optical engineering, precision positioning systems with micron-level or even sub-nanometer displacement resolution are urgently needed in many fields. The micro-nano positioning platform is a positioning device with micro / nano positioning resolution and precision. It is an important part of precision technology and has broad application prospects and important research value. [0003] Because piezoelectric ceramic actuators have many advantages such as high resolution, fast frequency response, no friction, no interference from magnetic fields, and no lubrication, they ar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00H02N2/00
Inventor 李天翼纪华伟
Owner HANGZHOU DIANZI UNIV