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Sheet type two-dimensional piezoelectric light reflection structure

A reflective structure, electro-optical technology, applied in optics, optical components, instruments, etc., can solve problems such as complex structure, achieve fast response, easy compatibility with semiconductor processing technology, and save investment.

Inactive Publication Date: 2006-02-08
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the existing piezoelectric optical scanning structure is mainly a piezoelectric composite structure that can realize one-dimensional swing or a piezoelectric composite structure that can realize two-dimensional swing but has a very complicated structure.

Method used

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  • Sheet type two-dimensional piezoelectric light reflection structure
  • Sheet type two-dimensional piezoelectric light reflection structure
  • Sheet type two-dimensional piezoelectric light reflection structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0055] The present invention has designed the first embodiment of the sliced ​​two-dimensional piezoelectric light reflection structure, such as Figure 1-4 shown.

[0056] The sliced ​​two-dimensional piezoelectric optical reflection structure is composed of a composite cantilever beam 1 composed of a set of piezoelectric ceramic slices 11 and a substrate 12 , a living hinge 13 , a reflective mirror 14 , and a support frame 15 . It is characterized in that: the reflective mirror 14 is connected with the composite cantilever beam 1 through the movable hinge 13, and the composite cantilever beam 1 is fixed by the surrounding support frame 15, and 141 is a mirror frame.

[0057] The piezoelectric ceramic sheet 11 is a single-layer sheet or a multi-layer laminated sheet structure, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheet 11 . The piezoelectric ceramic sheet 11 and the substrate 12 are bonded with epoxy glue, and the piezo...

Embodiment 2

[0065] The present invention has designed the second embodiment of the sliced ​​two-dimensional piezoelectric light reflection structure, such as Figure 5 shown.

[0066] The two-dimensional piezoelectric optical reflection structure in the form of a chip is composed of a composite cantilever beam 5 composed of a group of piezoelectric ceramic sheets 51 and a substrate 52 , a living hinge 53 , a mirror 54 , 541 is a mirror frame, and a support frame 55 . It is characterized in that: the reflecting mirror 54 is connected with the composite cantilever beam 55 and the supporting frame 55 through the movable hinge 53, and the composite cantilever beam 5 is fixed by the surrounding supporting frame 55.

[0067] The piezoelectric ceramic sheet 51 is a single-layer sheet or a multi-layer laminated sheet structure, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheet 51 . The piezoelectric ceramic sheet 51 and the substrate 52 are bonded...

Embodiment 3

[0075] The present invention has designed the third embodiment of the sliced ​​two-dimensional piezoelectric light reflection structure, such as Figure 6 shown.

[0076] Chip-type two-dimensional piezoelectric light reflection structure, composed of four groups of piezoelectric ceramic sheets 610, 620, 630, 640 and substrates 611, 621, 631, 641 respectively constitute four composite cantilever beams 61, 62, 63, 64 , a living hinge 65, a mirror 66, and a supporting frame 67 are formed. It is characterized in that: four composite cantilever beams 61, 62, 63 and 64 are symmetrically distributed in a cross, reflective mirror 66 is arranged at the center point of the cross through a living hinge 65, and the four composite cantilever beams 61, 62, 63 and 64 rely on the surrounding The support frame 67 is fixed.

[0077] The piezoelectric ceramic sheets 610, 620, 630, 640 are single-layer sheets, or multi-layer laminated sheets, and the polarization direction is along the thicknes...

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PUM

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Abstract

The invention relates to a precision mechanism light driving technology, which comprises a composite outrigger which is formed by a set of piezoelectric ceramic sheet with two electrodes and a base chip, a hinge, a reflecting lens and frame, and a supporting frame. The lens frame is connected with the base chip by the hinge; the base chip is fixed by the supporting frame. When the positive end of the power is paralleled with the two sets of the electrode area, the negative end of the power connects with the base chip, so that the composite outrigger generates a bend deformation; when the positive end and the negative end of the power are separately connected with the two sets of the electrode area, the composite outrigger generates a torsion deformation. The composite outrigger can also be formed by four cruciform symmetrical distributing outriggers with the reflecting lens in the center of the cruciform symmetric or by two vertical outriggers with the reflecting lens on the vertical point; the lens frame is connected with the supporting frame.

Description

technical field [0001] The invention belongs to the field of optical drive technology in precision machinery, and in particular relates to several typical structures of novel two-dimensional piezoelectric optical scanning. technical background [0002] In the background art, scanning optical systems play an important role in optical instruments. Commonly used optical scanning structures include: mechanical drive scanning structure, electromagnetic drive scanning structure, electrostatic drive scanning structure, piezoelectric drive scanning structure, acousto-optic deflection scanning structure, electro-optical deflection scanning structure, and polygonal prism rotary scanning structure. [0003] Among them, the research work on electromagnetic and electrostatic oscillation scanning structures was carried out relatively early, the theory and technology have matured, and they have been widely used in the field of optical scanning applications. Due to electromagnetic and elec...

Claims

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Application Information

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IPC IPC(8): G02B26/10G02B5/08
Inventor 褚祥诚袁松梅李梦恺
Owner TSINGHUA UNIV
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