Sheet type two-dimensional piezoelectric light reflection structure
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- TSINGHUA UNIV
- Publication Date
- 2006-02-08
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention belongs to the field of optical drive technology in precision machinery, and in particular relates to several typical structures of novel two-dimensional piezoelectric optical scanning. technical background
[0002] In the background art, scanning optical systems play an important role in optical instruments. Commonly used optical scanning structures include: mechanical drive scanning structure, electromagnetic drive scanning structure, electrostatic drive scanning structure, piezoelectric drive scanning structure, acousto-optic deflection scanning structure, electro-optical deflection scanning structure, and polygonal prism rotary scanning structure.
[0003] Among them, the research work on electromagnetic and electrostatic oscillation scanning structures was carried out relatively early, the theory and technology have matured, and they have been widely used in the field of optical scanning applications. Due to electromagnetic and elec...