Sheet type two-dimensional piezoelectric light reflection structure

A reflective structure, electro-optical technology, applied in optics, optical components, instruments, etc., can solve problems such as complex structure, achieve fast response, easy compatibility with semiconductor processing technology, and save investment.
CN1731236AInactive Publication Date: 2006-02-08TSINGHUA UNIV +1

Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
TSINGHUA UNIV
Publication Date
2006-02-08
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a precision mechanism light driving technology, which comprises a composite outrigger which is formed by a set of piezoelectric ceramic sheet with two electrodes and a base chip, a hinge, a reflecting lens and frame, and a supporting frame. The lens frame is connected with the base chip by the hinge; the base chip is fixed by the supporting frame. When the positive end of the power is paralleled with the two sets of the electrode area, the negative end of the power connects with the base chip, so that the composite outrigger generates a bend deformation; when the positive end and the negative end of the power are separately connected with the two sets of the electrode area, the composite outrigger generates a torsion deformation. The composite outrigger can also be formed by four cruciform symmetrical distributing outriggers with the reflecting lens in the center of the cruciform symmetric or by two vertical outriggers with the reflecting lens on the vertical point; the lens frame is connected with the supporting frame.
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Description

technical field

[0001] The invention belongs to the field of optical drive technology in precision machinery, and in particular relates to several typical structures of novel two-dimensional piezoelectric optical scanning. technical background

[0002] In the background art, scanning optical systems play an important role in optical instruments. Commonly used optical scanning structures include: mechanical drive scanning structure, electromagnetic drive scanning structure, electrostatic drive scanning structure, piezoelectric drive scanning structure, acousto-optic deflection scanning structure, electro-optical deflection scanning structure, and polygonal prism rotary scanning structure.

[0003] Among them, the research work on electromagnetic and electrostatic oscillation scanning structures was carried out relatively early, the theory and technology have matured, and they have been widely used in the field of optical scanning applications. Due to electromagnetic and elec...

Claims

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