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Methods for determining spatially resolved height information of samples using widefield microscopy and widefield microscopy

A technology of height information and microscopy, applied in microscopes, optical devices, instruments, etc., can solve problems such as interference and influence of measurement results

Active Publication Date: 2021-08-31
CARL ZEISS MICROSCOPY GMBH
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0010] Finally, common to all systems based on structured illumination is that vibrations can have a disturbing effect on the measurement results during phase pattern changes and / or when the sample or sensor is moved in the z-direction

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  • Methods for determining spatially resolved height information of samples using widefield microscopy and widefield microscopy
  • Methods for determining spatially resolved height information of samples using widefield microscopy and widefield microscopy
  • Methods for determining spatially resolved height information of samples using widefield microscopy and widefield microscopy

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Embodiment Construction

[0052] In the following description of the figures, the same reference numerals are used for the same elements. Their functional description also applies to figures or embodiments in which they are not explicitly mentioned.

[0053] figure 1 A first preferred embodiment of the wide-field microscope according to the invention is shown. A polychromatic illumination source 1 (eg broadband laser, halogen lamp, superluminescent diode, . . . ), wherein in this embodiment different spectral distributions can be selected by means of a selection element 2 . This selection element 2 can be eg an AOTF (Acousto-Optic Tunable Filter), a prism, a grating or even a filter selection unit. The illumination light can then be deflected in different directions by the deflection unit 3 . The deflection unit 3 is eg a rapidly switchable mirror (eg a galvanometer mirror), an AOD (Acousto Optical Deflector) or a polarization rotation based switching unit.

[0054] The structuring element 4 is arr...

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Abstract

The invention relates to a widefield microscope and a method of determining spatially resolved height information of a sample (14) using a widefield microscope. The widefield microscope includes: an illumination source (1,52,53) arranged in the path of the illumination beam; a first detector unit (17,33) for detecting the sample illuminated in the sample plane (P) A widefield image in the observation beam path of (14); a modulator for chromatic modulation of the illumination beam path or the observation beam path in a direction perpendicular to the sample plane (P); evaluation Unit for determining chromaticity confocal height information in each image point of the widefield image. The method includes the following steps: illuminating the sample (14) using a broadband illumination source (1) in an illumination beam path; performing chromaticity modulation on the illumination beam path or detection beam path; detecting at least one widefield image of the sample light reflected or determined to have a chromaticity confocal component; dependent on the chromaticity modulation, by evaluating the chromaticity confocal component of the detection beam path, from the widefield The field image determines the height information of the sample pixel by pixel.

Description

technical field [0001] The invention relates to a method and a wide-field microscope for determining spatially resolved height information of a sample using a wide-field microscope. Background technique [0002] The determination of spatially resolved height information of a sample is also referred to as optical sectioning. Such optical sections are used in particular in microscopy to determine topographic images of samples or to measure surface properties of samples such as roughness. [0003] For the characterization of technical surfaces, confocal microscopy is used today as a standard method. In most cases here sampling of the sample takes place in all three spatial directions, ie involving point scanning systems where the light beam is directed over the sample in x / y directions. In order to derive height information, a movement of the sample relative to the detector unit (in z-direction) is required. From the z-position dependent intensity maxima, height information ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/00G01B11/24
CPCG01B11/24G01B2210/50G02B21/0032G02B21/0064
Inventor 赫尔穆特·利珀特尼尔斯·兰霍斯拉尔夫·内茨拉尔夫·沃利斯彻斯基
Owner CARL ZEISS MICROSCOPY GMBH
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