Gas distribution device and method for special gas
A special gas and gas technology, applied in the direction of gas and gas/steam mixing, mixing methods, chemical instruments and methods, etc., can solve the problems of messy pipelines, low efficiency, increased leakage points, etc., and achieve the effect of low cost
Inactive Publication Date: 2018-03-13
清远先导材料有限公司
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Problems solved by technology
This is a conventional device for gas distribution. The disadvantage of this gas distribution device is that stress is generated between pipes and joints, which seriously affects the weighing accuracy and leads to inaccurate proportioning; only one bottle of gas can be distributed at a time, which is inefficient.
But its disadvantages are: first: the pipeline is messy, there are many welds, and many leakage points are added, which increases the risk point; second: the matching devices of the gas distribution device are difficult to meet the gas distribution requirements above 15MPa, which largely limits The use of this gas distribution method
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[0023] The technical solution will be clearly and completely described below in conjunction with the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0024] see image 3 , the present invention proposes a gas distribution device 300 for a special gas, placing N identical target gas cylinders 320 at the same height and connecting them to the same distribution shaft 350 through a metal tube 360, and placing a certain target gas cylinder 320 Placed on a precision electronic scale 330, the shunt shaft 350 communicates with the raw material bottle group 310 through a pipeline 340. The raw material bottle group 310 includes a raw material bottle cabinet 311 and several raw...
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The invention relates to a gas distribution device for special gas. The gas distribution device comprises N same target gas cylinders at the same height, N metal tubes and a diverting round shaft. Each one of the target gas cylinders is connected to the diverting round shaft through a metal pipe. The diverting round shaft is communicated with a raw material cylinder set through a pipe. The raw material cylinder set comprises a raw material cylinder cabinet and multiple raw material cylinders in the raw material cylinder cabinet. The pipe is provided with a valve. Based on the existing gas distribution device and method, through improvement, the gas distribution device and method for special gas are realized. Through a 1 / 4 NPT connection way, special gas distribution in multiple cylinders is realized. The device and method realize a low cost and produce desired effects.
Description
technical field [0001] The invention relates to the field of gas distribution of special gases, in particular to a gas distribution device and method for special gases. Background technique [0002] For the special gases required in the semiconductor and electronics industries, in order to maintain the stability of the gas or for the convenience of use, binary or multi-component mixed gases are often used. This is a huge difficulty for gas suppliers. Conventional gas distribution methods, such as the gas distribution of standard gas, the existing methods are mostly single-bottle gas mixing, and the gas distribution sequence is selected according to the pressure of the raw material gas and the nature of the gas. The gas distribution device 100 is as figure 1 , a raw material bottle 110 and a target gas bottle 120 communicate through a pipeline 140 , and the target gas bottle is placed on a precision electronic scale 130 . This is a conventional device for gas distribution. ...
Claims
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IPC IPC(8): B01F3/02B01F13/00B01F15/02B01F15/04B01F23/10
CPCB01F23/19B01F33/00B01F35/712B01F35/881
Inventor 粟糠荣朱刘徐建
Owner 清远先导材料有限公司