White light interference three-dimensional shape measurement optical system

A technology of three-dimensional topography and optical system, which is applied in measurement devices, optical devices, instruments, etc., can solve the problems of small working field of view, inability to achieve imaging observation capability, and short working distance.

Active Publication Date: 2018-03-13
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The invention aims to solve the technical problems in the prior art that the working field of view is small, the working distance is short, and the measured target cannot be effectively marked, so that the imaging observation ability of the measured target cannot be realized, and a white light interference three-dimensional shape measurement optical system is provided. System, capable of imaging and obtaining interference images carrying target shape information

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Embodiment Construction

[0026] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0027] The present invention provides an embodiment of a white light interference three-dimensional shape measurement optical system, including a wide-spectrum light source 101, a projection lighting mirror group 102, a beam splitter 103, a standard mirror 104, a first orientation adjuster 107, and a second orientation adjustment Device 108, linear driver 109, measuring mirror group 105 and detector array 106;

[0028] The projection lighting mirror group 102 is located on the incident optical axis of the incident surface of the beam splitter 103, and is perpendicular to the incident optical axis;

[0029] The standard reflector 104 is located on the transmission optical axis of the projection surface of the beam splitter 103, and the first azimuth adjuster 107 is driven and connected to the standard reflector 104 for adjusting the standard ...

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Abstract

A white light interference three-dimensional shape measurement optical system provided by the present invention comprises a wide spectral coverage light source, a projection illuminating mirror set, aspectroscope, a standard reflector, a first orientation adjuster, a second orientation adjuster, a linear driver, a measurement mirror set and a detector array. The wide spectral coverage light source sends out the wide spectral coverage illumination light, the light is projected to the surface of a measured object and the surface of the standard reflector after passing the projection illuminating mirror set, and the reflection light at two places is combined by the spectroscope to form a spatial interference light field, irradiates to the measurement mirror set and is projected to a photoelectric detector. The white light interference three-dimensional shape measurement optical system of the present invention can image to obtain an interference image carrying the morphology information of a target object, and can real-timely record and observe the interference image of the target object, thereby providing the data bases for obtaining the three-dimensional morphology information and the two-dimensional image information of the measured object.

Description

technical field [0001] The invention relates to the technical field of interference measurement application, in particular to a white light interference three-dimensional shape measurement optical system. Background technique [0002] With the vigorous development of micro-nano technology, the processing objects are also extending in a smaller and more precise direction, accompanied by how to accurately measure the micro-nano structure in three dimensions. In the prior art, since the white light interferometer can perform high-precision measurement on steep microscopic steps, it has become an important tool for micro-nano structure measurement. Most of the existing white light interferometers use the Linnik and Mirau structures. This structure can obtain three-dimensional high-precision measurement information of the measured target, but there are also problems such as small working field of view, short working distance, and ineffectiveness of the measured target. Labeling ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/0203G01B11/2441
Inventor 姚东
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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