Device and method for detecting uniformity of infrared optimal material

Abstract

The invention discloses a device and method for detecting the uniformity of an infrared optimal material. The device is characterized by adopting a uniform infrared light beam generating device comprising an infrared light source, a stray light shielding pipe, a collimation part and a beam expanding part, wherein incident light is reflected by 90 DEG by an infrared beam splitter, reflected incident light is focused onto a material to be detected through a varifocus lens; a light beam reflected by the material to be measured is transmitted to an infrared sensor through the varifocus lens, the infrared beam splitter and a focusing lens, and the uniformity evaluation of a non-transparent visible light infrared optical material to be detected is realized through processing an infrared signal. Compared with a conventional method and device for evaluating the infrared optical material, the method and the device for evaluating the uniformity of the infrared optical material, disclosed by the invention, are capable of obtaining morphology and position information of a defect within a certain depth of a field of a focusing surface inside the infrared optical material to be detected can be obtained, and obtaining three-dimensional morphology and position information of the defect inside the infrared optical material to be detected, so that a fine evaluation function of the uniformity of the infrared optical material is realized.

Description

technical field [0001] The invention relates to a uniformity detection device and method for visible light opaque infrared optical materials, in particular to a detection method for detecting internal defects of visible light opaque infrared optical materials such as single crystal germanium and chalcogenide glass, and a detection method for material uniformity and device. Background technique [0002] As the range of applications in military and civilian applications becomes wider and wider, the quality requirements of infrared optical materials are also increasing. Internal defects of infrared optical materials (such as streaks, cracks, phase separation, bubbles, etc.) Uniformity and other reasons. [0003] For the detection of the uniformity of visible light transparent optical glass, there are now mature interference or holographic detection methods, and the relevant national standards (GB / T7962.3-2010) have been formed. However, for visible light opaque infrared opti...

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Problems solved by technology

As the magnification of the microscope increases, the depth of field will decrease accordingly, and only the structures near the focal plane can be seen clearly.

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