High-precision short coherent light three-dimensional morphology rapid measuring algorithm

A technology of three-dimensional shape and short coherent light, which is applied in the direction of measurement devices, calculations, and optical devices, can solve problems such as long running time of algorithms, reduce overall running time, improve measurement accuracy and reliability, shorten time consuming effect

Active Publication Date: 2019-05-14
NANJING UNIV OF SCI & TECH
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Problems solved by technology

The method described in this patent also needs to collect all the interference images to calculate the intensity information, then solve the phase shi

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  • High-precision short coherent light three-dimensional morphology rapid measuring algorithm
  • High-precision short coherent light three-dimensional morphology rapid measuring algorithm
  • High-precision short coherent light three-dimensional morphology rapid measuring algorithm

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Embodiment 1

[0049] combine Figure 1 to Figure 8 , a high-precision short-coherent light three-dimensional fast shape measurement algorithm. During the experiment, the optical system is equipped with an interference objective lens system with a magnification of 20×. The light source uses short-coherent light with a central wavelength of 576nm. The sample with the same shape is detected, and its step height is 332nm. The control and data processing system controls the scanning system to collect 120 within the total scanning length of 8.64μm according to the phase step of π / 2 (the corresponding step distance is 72nm). Interferometric images are calculated. The implementation steps of the high-precision short-coherent light three-dimensional shape fast measurement algorithm proposed in this patent are as follows:

[0050] Step 1. Combine figure 2 As shown in the schematic diagram of the optical path structure, connect the light source to the lighting system, adjust the spatial position of...

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Abstract

The invention discloses a high-precision short coherent light three-dimensional morphology rapid measuring algorithm. The high-precision short coherent light three-dimensional morphology rapid measuring algorithm comprises the steps that firstly piezoelectric ceramics are driven to perform time sequence perpendicular scanning according to pi/2 phase position stepping quantities within a certain scanning length, and an interference pattern is stored according to each corresponding stepping quantity; the interference patterns are calculated and processed and blended into the process of time sequence perpendicular scanning interference pattern storing to realize rapid measuring; the interference patterns are recorded complete while time sequence perpendicular scanning is carried out, contractratio solution of various pixel point phase shift scanning refined phase and the multiple interference patterns in airspace is completed. The contract ratio of the multiple interference patterns areprocessed to obtain a perpendicular scanning coarse phase; then, the phase shift scanning refined phase is fused with the perpendicular scanning coarse phase to obtain a three-dimensional morphology measuring result; and finally, batwing errors of a sample to be measure generated at edges of step morphology are judged and removed by adopting a two-dimension discrete difference algorithm to obtaina high-precision three-dimensional morphology measuring result. The high-precision short coherent light three-dimensional morphology rapid measuring algorithm is simple, the speed is high, the precision and confidence level is high, and environmental noise resistance capacity is high.

Description

technical field [0001] The invention relates to the technical field of precision optical measurement engineering, and more specifically, to a fast measurement algorithm for three-dimensional shape of high-precision short-coherent light. Background technique [0002] With the gradual improvement of processing technology, the use of precision components is becoming more and more extensive, and it plays an irreplaceable role in aerospace, vehicle systems, imaging lighting and other fields. By measuring the shape characteristics of components, the quality of components can be quantitatively evaluated, and its Whether the function in the system is affected is of great significance to the quality monitoring of components. [0003] Short-coherence light interferometry technology is a non-contact optical measurement technology for surface micro-topography with strong applicability, high precision and excellent timeliness. Intuitive 3D topography of component surface contours. Alth...

Claims

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Application Information

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IPC IPC(8): G01B11/24G06T17/05
Inventor 袁群孙一峰高志山于颢彪黄旭胡乔伟徐伟施帅飞
Owner NANJING UNIV OF SCI & TECH
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