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Surface shape measurement device and method based on structured light illumination

A technology for structured light illumination and measurement devices, which is applied in the direction of measurement devices, optical devices, instruments, etc., can solve problems that restrict the application of zoom surface shape measurement methods, and achieve simple installation and adjustment, improved detection efficiency, and fast axial scanning speed Effect

Active Publication Date: 2019-06-11
HARBIN INST OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, affected by background noise, for samples with low reflectivity and large reflectivity differences, the conventional method will introduce large errors, which restricts the application of the zoom surface shape measurement method

Method used

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  • Surface shape measurement device and method based on structured light illumination
  • Surface shape measurement device and method based on structured light illumination
  • Surface shape measurement device and method based on structured light illumination

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Experimental program
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Embodiment 1

[0035] Embodiment 1: as attached figure 1 The illustrated embodiment provides a surface shape measurement device based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.

[0036] A surface shape measurement device based on structured light illumination, including a Kohler illumination module, an axial scanning module and a detection module;

[0037] According to the direction of light propagation, the Kohler lighting modules are: Kohler lighting module-1, amplitude type sinusoidal grating 2 and tube mirror-3;

[0038] According to the light propagation direction, the axial scanning module is as follows: beam splitter one 4, objective lens one 5, plane mirror 6, tube mirror two 7, tube mirror three 8, beam splitter two 9 and objective lens two 10;

[0039] According to the direction of light propagation, the detection modules are: tube mirror 11 and CCD 12;

[0040] The sample to be measured 13 ...

Embodiment 2

[0043] Embodiment 2: as attached figure 2 and image 3 The illustrated embodiment provides a surface shape measurement method based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.

[0044] A method for measuring surface shape based on structured light illumination, the method is implemented based on the surface shape measurement device based on structured light illumination described in Embodiment 1, and the specific steps are:

[0045] Data collection steps:

[0046] Step a, the Kohler lighting module-1 emits white light, the white light is modulated by the amplitude-type sinusoidal grating 2, then passes through the tube mirror-3, the beam splitter-4 and the objective lens-5 in sequence and exits to the plane reflector 6, and the reflected light passes through the objective lens in sequence 15, beam splitter 1 4, tube mirror 2 7, tube mirror 3 8, beam splitter 2 9 and objective lens 2 10 ...

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Abstract

A surface shape measurement device and a method based on structured light illumination belong to the optical microscopic imaging and measurement technology field. The device comprises a structured light illumination module, an axial scanning module and a detection module. An axial scanning device formed by a polarizing beam splitter, a low aperture objective lens, a pipe mirror, a plane reflectingmirror and the like is added in a conventional structured light illumination microscope system so as to realize high speed axial movement of structured light illumination stripes in an observed sample space. Window Fourier transform is used to process images shot under different z direction position stripe projections. A correlation coefficient of each subarea image at a projection stripe frequency is calculated and each horizontal position definition axial response curve is acquired. A peak value position of the curve is a relative height of a sample at a transverse position, and finally a sample surface shape is acquired. The device and the method possesses advantages that installation and adjustment are convenient; an axial scanning speed is fast; and an influence of a sample surface reflectivity difference on a measurement result is small and a signal to noise ratio is high.

Description

technical field [0001] The present invention relates to a surface shape measurement device and method, in particular to a surface shape measurement device and method based on structured light illumination, which can realize high-speed axial scanning of structured light illumination stripes in the observed sample space, and reduce background noise The influence of the reflectance difference with the surface second of the sample on the measurement result belongs to the field of optical microscopic imaging and surface shape measurement. Background technique [0002] The zoom surface shape measurement method obtains the surface shape of the sample surface by judging the imaging clarity of the measured sample at different axial positions within the field of view of the imaging objective lens. The conventional zoom surface measurement method uses the stage to drive the sample to scan axially, and the scanning speed is slow and the efficiency is low. Moreover, conventional methods...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B11/25
CPCG01B11/2433G01B11/254
Inventor 刘辰光刘俭赵一轩陈刚李勇谭久彬
Owner HARBIN INST OF TECH
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