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Surface shape measurement device and method based on structured light illumination

A technology of structured light illumination and measurement device, which is applied to measurement devices, optical devices, instruments, etc., can solve problems such as restricting the application of zoom surface shape measurement methods, achieve simple installation and adjustment, improve detection efficiency, and fast axial scanning speed. Effect

Active Publication Date: 2019-06-11
HARBIN INST OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, affected by background noise, for samples with low reflectivity and large reflectivity differences, the conventional method will introduce large errors, which restricts the application of the zoom surface shape measurement method

Method used

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  • Surface shape measurement device and method based on structured light illumination
  • Surface shape measurement device and method based on structured light illumination
  • Surface shape measurement device and method based on structured light illumination

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Embodiment 1

[0039] Embodiment 1: as attached figure 1 The illustrated embodiment provides a surface shape measurement device based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.

[0040] A surface shape measurement device based on structured light illumination, comprising a structured light illumination module, an axial scanning module and a detection module;

[0041]The structured light illumination module is composed of two illumination optical paths, the first illumination optical path is as follows according to the direction of light propagation: laser device-1, conduction optical fiber-2, collimator mirror-3, amplitude type sinusoidal grating-4 and tube mirror- 5. The second illumination light path is as follows according to the direction of light propagation: laser 2 9, conduction fiber 2 10, collimator 2 11, amplitude type sinusoidal grating 2 12 and tube mirror 2 13;

[0042] According to the li...

Embodiment 2

[0052] Embodiment 2: as attached figure 1 and figure 2 The illustrated embodiment provides a surface shape measurement method based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.

[0053] A method for measuring surface shape based on structured light illumination, the method is implemented based on the surface shape measurement device based on structured light illumination described in Embodiment 1, and the specific steps are:

[0054] Step a, the laser 1 emits excitation light, and forms parallel light after passing through the conductive fiber 2 and the collimating mirror 3. The parallel light is modulated by the amplitude type sinusoidal grating 1 4 and then emitted by the tube mirror 1 5. At the same time, the laser 2 9 emits The excitation light forms parallel light after passing through the conductive optical fiber 2 10 and the collimating mirror 11. The parallel light is modulated by...

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Abstract

The present invention provides a device and a method for surface shape measurement based on structured light illumination, belonging to the technical field of optical microscopy imaging and measurement. The device is characterized in that: the device comprises a structured light illumination module, an axial scanning module and a detection module. A conventional structural light illumination microscopic system is added with an axial scanning device formed by polarization spectroscopes, low-aperture object lenses, tube lenses and a planar mirror so as to achieve high-speed axial movement of structural light illumination stripes in a space for samples in observation, windowed Fourier transform is employed to perform processing of images shot under different z-directional position stripe projections, the correlated coefficient of each sub area image at a projection strip frequency is calculated, each transverse position sharpness axial response curve is obtained, the peak of the curve isa relative height of the sample at the transverse position, and a surface shape of the sample is finally obtained. The device and the method for surface shape measurement based on the structured lightillumination are simple in mounting and regulation and fast in axial scanning speed, the influence of sample surface reflectivity difference on measurement result is small, a signal to noise ratio ishigh.

Description

technical field [0001] The present invention relates to a surface shape measurement device and method, in particular to a surface shape measurement device and method based on structured light illumination, which can realize high-speed axial scanning of structured light illumination stripes in the observed sample space, and reduce background noise The influence of the reflectance difference with the surface second of the sample on the measurement result belongs to the field of optical microscopic imaging and surface shape measurement. Background technique [0002] The zoom surface shape measurement method obtains the surface shape of the sample surface by judging the imaging clarity of the measured sample at different axial positions within the field of view of the imaging objective lens. The conventional zoom surface measurement method uses the stage to drive the sample to scan axially, and the scanning speed is slow and the efficiency is low. Moreover, conventional methods...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/25
CPCG01B11/25
Inventor 刘辰光刘俭赵一轩陈刚李勇谭久彬
Owner HARBIN INST OF TECH
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