Eureka AIR delivers breakthrough ideas for toughest innovation challenges, trusted by R&D personnel around the world.

Surface shape measurement device and method based on structured light illumination

A technology for structured light illumination and measuring devices, which is applied in measuring devices, optical devices, instruments, etc., can solve the problems that restrict the application of zoom surface shape measurement methods, and achieve simple installation and adjustment, improved detection efficiency, and fast axial scanning speed Effect

Inactive Publication Date: 2019-06-18
HARBIN INST OF TECH
View PDF12 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, affected by background noise, for samples with low reflectivity and large reflectivity differences, the conventional method will introduce large errors, which restricts the application of the zoom surface shape measurement method

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Surface shape measurement device and method based on structured light illumination
  • Surface shape measurement device and method based on structured light illumination
  • Surface shape measurement device and method based on structured light illumination

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Example 1: As attached figure 1 The illustrated embodiment provides a surface shape measurement device based on structured light illumination, which is used to quickly switch the axial position to realize three-dimensional tomography.

[0037] A surface shape measuring device based on structured light illumination, including a structured light illumination module, an axial scanning module and a detection module:

[0038] According to the light propagation direction, the structured light illumination module is as follows: laser 1, conducting fiber 2, collimator 3, amplitude sinusoidal grating 4, and tube mirror 5;

[0039] According to the light propagation direction, the axial scanning module is: polarization beam splitter 6, quarter wave plate 7, objective lens 8, plane mirror 9, tube lens 2 10, tube lens 3 11, polarization beam splitter Two 12, quarter wave plate two 13 and objective lens two 14;

[0040] According to the light propagation direction, the detection modules are...

Embodiment 2

[0046] Example 2: As attached figure 2 with 3 The illustrated embodiment provides a surface shape measurement method based on structured light illumination, which is used to quickly switch the axial position to achieve three-dimensional surface shape measurement.

[0047] A surface shape measurement method based on structured light illumination, which is implemented based on the surface shape measurement device based on structured light illumination described in Embodiment 1. The specific steps are as follows:

[0048] Data collection steps:

[0049] Step a. Laser-1 emits excitation light, which forms parallel light after passing through the conductive fiber 2 and the collimator lens 3. The parallel light is modulated by the amplitude-type sinusoidal grating 4, and then passes through the tube lens 5, the polarization beam splitter 6, and the quarter in sequence. The one-wave plate one 7 and the objective lens one 8 are emitted to the plane mirror 9, and the reflected light passes t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The shape measuring device and method based on structured light illumination belongs to the technical field of optical microscopy imaging and measuring. The device and method are characterized in thatthe device comprises a structured light illumination module, an axial scanning module and a detection module. According to the shape measuring device and method based on structured light illumination, the axial scanning module comprising a polarization beam splitter, a quarter-wave plate, a low aperture objective lens, a tube lens and a plane reflector is added to a conventional structured lightillumination microscopy system, the high-speed axial movement of a stripe of the structured light illumination in an observed sample space is achieved, the pictures taken under fringe projections of different Z axis positions are processed by using windowed Fourier transform, correlation coefficients of each subarea image at the projected fringe frequency are calculated, an axial response curve ofdefinition of each lateral positions is acquired, the peak position of the curve is the relative height of the lateral position of the sample, and ultimately the surface shape of the sample is acquired. The device has the advantages that the installing and adjusting is simple, the axial scanning is fast, the surface reflectivity difference of the sample has small impact on a measuring result, andthe signal-to-noise ratio is high.

Description

Technical field [0001] The invention relates to a surface shape measuring device and method, in particular to a surface shape measuring device and method based on structured light illumination, which can realize high-speed axial scanning of structured light illumination stripes in an observed sample space and reduce background noise The influence of the difference in reflectance between the second and the sample on the measurement results belongs to the field of optical microscopy imaging and surface shape measurement. Background technique [0002] The zoom surface shape measurement method obtains the surface shape of the sample by judging the sharpness of the image of the sample under different axial positions in the field of view of the imaging objective lens. The conventional zoom surface measurement method uses a stage to drive the sample for axial scanning, which has a slow scanning speed and low efficiency. In addition, the conventional method uses the contrast of pictures...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/25
CPCG01B11/2433G01B11/254
Inventor 刘辰光郑婷婷谭久彬
Owner HARBIN INST OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com