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Reference device, measuring and coating device, measurement accuracy guarantee, and film manufacturing method

A technology of measuring devices and benchmarks, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of coating film thickness deviation and difficult to manage film thickness, etc.

Active Publication Date: 2020-07-17
NITTO DENKO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the above method for producing a coating film, if the measurement accuracy of the spectroscopic interference measurement device deviates from the desired accuracy, it is difficult to adequately manage the film thickness, and as a result, the thickness of the formed coating film varies.

Method used

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  • Reference device, measuring and coating device, measurement accuracy guarantee, and film manufacturing method
  • Reference device, measuring and coating device, measurement accuracy guarantee, and film manufacturing method
  • Reference device, measuring and coating device, measurement accuracy guarantee, and film manufacturing method

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Embodiment Construction

[0039] Hereinafter, a reference device according to an embodiment of the present invention, a spectroscopic interferometric measurement device using the same, a coating device, a method for ensuring measurement accuracy of a spectroscopic interferometric measurement device, and a method of manufacturing a coating film will be described with reference to the accompanying drawings. illustrate.

[0040] First, a description will be given of a coating device including a spectroscopic interferometry measuring device having a reference device according to the present embodiment as a film thickness measuring unit.

[0041] like figure 1 and figure 2As shown, the coating device 1 of this embodiment includes: a coating unit 13 that sequentially coats the coating liquid 3 onto a belt-shaped sheet that relatively moves toward the downstream side in the longitudinal direction (see the solid arrow). The coating film 40 is formed on the sheet 11; the film thickness measuring part 21 mea...

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Abstract

The invention provides a reference device, a measurement and coating device, a measurement accuracy guarantee and a film manufacturing method. The reference device is configured to include a non-translucent first block having a groove, and a light-transmitting second block laminated on the first block, and the spectroscopic interference measurement device passes through the second block. The block irradiates light to the groove of the first block, and the reflected light from the surface of the second block on the side of the first block and the reflected light from the bottom surface of the groove Predetermined interference light corresponding to the depth of the groove is formed.

Description

technical field [0001] The invention relates to a benchmark, a spectroscopic interference measuring device, a coating device, a method for ensuring measurement accuracy of the spectroscopic interferometric measuring device, and a method for manufacturing a coating film. Background technique [0002] Conventionally, a coating film has been produced by applying a coating liquid to a sheet. For example, a coating film is produced by coating a coating liquid such as an adhesive on a substrate as a sheet. [0003] As a method for producing such a coating film, a method is used in which a coating unit that forms a coating film by coating a coating liquid on a sheet and a film thickness measuring unit that measures the thickness of the coating film are used. The coating device of the spectroscopic interferometric measuring device of the company measures the thickness of the coating film while coating the coating liquid on the sheet to manufacture the coating film. [0004] Howeve...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/93
CPCG01N21/93G01N2021/933G01B11/0675G01J3/45
Inventor 道平创近藤信
Owner NITTO DENKO CORP
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