Near-field ion source for simultaneous in-situ acquisition of micro-nano scale morphology and chemical information

Abstract

The invention discloses a near-field ion source for simultaneously obtaining micro / nanoscale shape information and chemical information in situ and relates to the near-field ion source. The near-fieldion source is provided with a light source, a rear ionization source, an optical fiber, a Z-axis optical fiber-sample distance control system, a sample, a mass analyzer and an XY two-dimensional mobile platform, wherein the control system is used for controlling the distance between the tail end of the optical fiber and the sample and Z-axis height information is obtained through a feedback system when the optical fiber is close to the surface of the sample; light beams emitted from the light source are transmitted through the optical fiber and irradiate the surface of the sample; ions generated by the rear ionization source enter the mass analyzer through transmission and a mass spectrometry spectrum is obtained through the mass analyzer; the micro / nanoscale shape information of the surface of the sample is recorded through a point-by-point scanning method to obtain an imaging diagram of a three-dimensional shape outline; and the chemical information of a micro-region on the surfaceof the sample is recorded in situ, so that a two-dimensional imaging mass spectrogram of the chemical information on the surface of the sample is obtained, the obtained spatial resolution can reach the microscale or even nanoscale and deep analysis of molecule and element thin-layers can be achieved.

Description

technical field [0001] The invention relates to a near-field ion source, in particular to a near-field ion source for simultaneous in-situ acquisition of micro-nano scale morphology and chemical information. Background technique [0002] With the rapid development of modern nanotechnology, how to achieve in-situ and comprehensive characterization and imaging of new nanomaterials, microelectronics, life sciences, and ultrastructure in single cells at the micro-nano scale has become a challenge for scientists. pressing scientific issues. In-situ characterization and imaging require that the analysis method be able to characterize and image the surface morphology, chemical composition (including elemental and molecular information), physical properties, and molecular structure of complex real samples with micron or even nanoscale spatial resolution. [0003] Currently, scanning probe microscopy (SPM) and mass spectrometry (MS) are mainly used to analyze the physical and chemic...

AI Technical Summary

Problems solved by technology

However, this "quasi-in-situ" physical and chemical property characterization still has the problem of difficult positioning and inability to detect simultaneously and in-situ

[0006] Although the above SPM-MS-based combined methods can provide information on the physical and chemical composition of materials at the micro-nano scale and reconstruct them into three-dimensional mass spectrometry images, these research work still have the following deficiencies: 1) Molecular transport under atmospheric pressure , there is a large amount of transmission loss, resulting in poor detection limits of instrumental methods, and it is difficult to obtain mass spectrometry imaging at the nanometer scale

2) SPM is only used as an "embedded" or auxiliary tool instead of itself as an ion source, which makes the combination of SPM and MS expensive, and poor positioning accuracy or positioning difficulties make this combination lose its originality. meaning of bit analysis

The above-mentioned shortcomings limit the inability of these methods to obtain nanoscale morphology and chemical imaging information in situ, and directly use SPM as the ionization source of the mass spectrometer, and the morphology and imaging information can be obtained in one step, which is more conducive to the in situ analysis method. Popularization and wide application, which is also the core of this patent

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