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Sensor element for pressure sensor

A sensor element, pressure sensor technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic components, instruments, etc., can solve the problem of bridge voltage division and other problems, and achieve the effect of optimizing the manufacturing process

Active Publication Date: 2018-07-17
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This can result in a change in bridge voltage due to a temperature gradient that cannot be distinguished from a change in bridge voltage due to applied pressure

Method used

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  • Sensor element for pressure sensor
  • Sensor element for pressure sensor
  • Sensor element for pressure sensor

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Experimental program
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Embodiment Construction

[0030] The basic idea of ​​the invention is to compensate for the different resistance values ​​of the piezoresistivity of the piezoresistive sensor element due to the effect of the temperature gradient running across the sensor membrane of the sensor element. A temperature gradient of several millikelvins across the sensor membrane can lead to a deviation of the bridge voltage corresponding to several Pascals and thus to an inaccurate pressure measurement.

[0031] With the aid of at least two elements for temperature measurement (for example in the form of temperature-sensitive diodes, temperature-sensitive resistors, etc.), a temperature gradient across the sensor membrane or across the sensor element can be determined. With knowledge of this temperature gradient, the mentioned deviations in the bridge voltage can be compensated computationally by known methods.

[0032] figure 1 A conventional sensor element 100 is schematically shown with a sensor membrane 10 on which fo...

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Abstract

The invention relates to a sensor element (100) for a pressure sensor, The sensor element comprises: a sensor membrane (10), on which a defined number of piezoresistors (R1...Rn) is arranged, whereinthe piezoresistors (R1...Rn) are arranged in a circuit in such a way that a voltage change can be generated in the event of a pressure change; at least two temperature-measuring elements (T1...Tn), which are arranged in relation to the sensor membrane (10) in such a way that temperatures of the sensor membrane (10) at positions of the piezoresistors (R1...Rn) can be measured by means of the temperature-measuring elements (T1...Tn), wherein a voltage present at the circuit of the piezoresistors (R1...Rn) because of a temperature gradient can be computationally compensated by means of the measured temperatures.

Description

technical field [0001] The invention relates to a sensor element for a pressure sensor. The invention also relates to a method for producing a sensor element for a pressure sensor. Background technique [0002] A piezoresistive pressure sensor usually consists of a sensor element (sensor-die in English) with a diaphragm. For example, four stress-sensitive piezoresistors, which are connected as a bridge circuit, are located on the diaphragm. [0003] A temperature gradient acts on the sensor element, which means that the piezoresistor has different resistance values ​​due to different temperatures. This can lead to changes in the bridge voltage due to temperature gradients which cannot be distinguished from changes in the bridge voltage due to applied pressure. In this case, already a few millikelvins can lead to a deviation of the bridge voltage, which corresponds to a pressure change of several pascals. Contents of the invention [0004] The object of the present inve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00G01L19/00
CPCG01L9/0052G01L19/0092G01L9/085
Inventor R·菲克斯M·米奇克S·策林格T·S·弗赖Z·莱什詹J·佛伦茨
Owner ROBERT BOSCH GMBH