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Developing apparatus

A developing device and developing solution technology, which is applied in photography, optics, instruments, etc., can solve the problems of measuring the concentration of absorbed carbon dioxide, not knowing the characteristic value of developing solution, and difficult to maintain developing performance, so as to achieve the effect of maintaining developing characteristics

Inactive Publication Date: 2018-07-31
HIRAMA LAB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This makes it more difficult to calculate the concentration of components with high precision and manage the developer with high precision.
[0016] In addition, regarding the concentration of carbon dioxide absorbed by the developer (hereinafter referred to as "absorbed carbon dioxide concentration"), an appropriate characteristic value of the developer that has a good correlation with the absorbed carbon dioxide concentration is not known, and it is currently difficult to Highly accurate measurement of absorbed carbon dioxide concentration
Therefore, it is difficult to maintain the desired developing performance

Method used

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Experimental program
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Effect test

no. 1 approach 〕

[0099] Figure 4is a schematic diagram of the developing device of the first embodiment. The developing device includes a developer solution preparation device 92 , a new developer solution pipeline 82 , a developer original solution pipeline 81 , a pure water pipeline 83 , and a developer solution management device E. The developer solution management device E can replenish the developer solution with a replenishing solution based on the density value of the developer solution measured by the densitometer 11 and use the corresponding relationship between the density of the developer solution and the concentration of absorbed carbon dioxide, thereby reducing the absorbed carbon dioxide concentration of the developer solution. Concentration is managed.

[0100] first of all, yes Figure 4 The shown developing process equipment B is simply explained.

[0101] The development process equipment B is mainly composed of a developer solution storage tank 61, an overflow tank 62, a...

no. 2 approach 〕

[0125] Figure 5 is a schematic diagram of a developer solution management device that calculates the absorbed carbon dioxide concentration based on the density value of the developer solution measured by a densitometer, based on the correspondence between the density of the developer solution and the absorbed carbon dioxide concentration, and based on The absorbed carbon dioxide concentration of the developer is managed by supplying a replenisher to the developer based on the calculated absorbed carbon dioxide concentration of the developer. For convenience of description, the developer solution management device E is shown together with the development process equipment B, the replenishing liquid storage part C, and the circulation stirring mechanism D so as to be connected to the development process equipment B.

[0126] The developer solution management device according to this embodiment is a developer solution management device in which a calculation unit that calculates...

no. 3 approach 〕

[0135] Figure 6 is a schematic diagram of a developing solution management device that calculates the absorbed carbon dioxide concentration based on the density value of the developing solution measured by a densitometer, based on the correspondence relationship between the density of the developing solution and the absorbed carbon dioxide concentration, based on the calculated The absorbed carbon dioxide concentration of the developer is controlled by supplying a replenisher to the developer, thereby controlling the absorbed carbon dioxide concentration of the developer. For convenience of description, the developer solution management device E is shown together with the development process equipment B, the replenishing liquid storage part C, and the circulation stirring mechanism D so as to be connected to the development process equipment B.

[0136] The developer solution management device according to the present embodiment is a developer solution management device in wh...

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Abstract

The invention provides a developing apparatus capable of measuring the concentration of carbon dioxide absorbed by a developing solution which exhibits alkalinity and managing the concentration of carbon dioxide absorbed by the developing solution which exhibits alkalinity. The developing apparatus includes a developing solution preparing device that mixes a developing stock solution containing amain component of the developing solution that exhibits alkalinity with pure water to prepare a developing solution having a predetermined concentration as a developing new liquid; a developing new solution pipeline for conveying the developing new liquid supplied from the developing solution preparing device to the repeatedly used developing solution; and a developing stock solution pipeline forconveying the developing stock solution to the repeatedly used developing solution; a pure water pipeline for conveying pure water supplied to the repeatedly used developing solution; and a developingsolution management device for managing the repeatedly used developing solution to a predetermined component concentration or a specified concentration range.

Description

technical field [0001] The present invention relates to a developing device used for developing a photoresist film in a developing process of a circuit board of a semiconductor or a liquid crystal panel. Background technique [0002] In the development process of photolithography for realizing fine wiring processing of semiconductors, liquid crystal panels, etc., as a chemical solution for dissolving the photoresist film formed on the substrate, a developing solution that exhibits alkalinity (hereinafter called "alkaline developer"). [0003] In the manufacturing process of semiconductors and liquid crystal panel substrates, the size of wafers and glass substrates, and the miniaturization and high integration of wiring processing have been progressing in recent years. Under such circumstances, in order to achieve miniaturization and high integration in wiring processing of large substrates, it is necessary to measure the concentration of the main component of the alkaline d...

Claims

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Application Information

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IPC IPC(8): G03D3/00G03F7/30G03F7/32
CPCG03D3/00G03F7/3071G03F7/32G03F7/0025
Inventor 中川俊元
Owner HIRAMA LAB