Manufacturing method of porous quartz glass base material
A technology of porous quartz and a manufacturing method, applied in glass manufacturing equipment, glass molding, manufacturing tools, etc., can solve problems such as excessive shape change and cracks
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Embodiment 1
[0053] A hemisphere of R50 was formed by grinding on the tip of a cylindrical unstained quartz rod (diameter φ100 mm), and the surface roughness of the processed surface at this time was Rz=50 μm to prepare a seed rod. The measurement of the surface roughness of the rough surface of the seed rod was performed based on JISB 0601-2001 using a surface roughness meter (small surface roughness measuring machine: Surftest SJ-210, manufactured by Mitutoyo Corporation).
[0054] Using this kind of rod, through the VAD method, the raw material is silicon tetrachloride, the combustible gas is hydrogen, the combustible gas is oxygen, and the non-combustible gas is nitrogen, and then introduced into the concentric multiple tube burner, while burning The soot body is produced while the hydrolysis reaction is carried out in the flame, creating a semi-glazed area. Details of the production conditions are shown in Table 1.
[0055] 【Table 1】
[0056]
[0057] Manufacture 20 soot bodies w...
Embodiment 2
[0060] Form the hemisphere of R50 by grinding on the top of the cylindrical dirt-free quartz rod (diameter φ100mm), and further process the hemisphere at a pitch of 1mm or less to form a concave and convex with a depth d: 0.5mm≤d≤1.5mm. Into a stick.
[0061] Using this kind of rod, through the VAD method, the raw material is silicon tetrachloride, the combustible gas is hydrogen, the combustible gas is oxygen, and the non-combustible gas is nitrogen, and then introduced into the concentric multiple tube burner, while burning The soot body is produced while the hydrolysis reaction is carried out in the flame, creating a semi-glazed area. Details of the production conditions are shown in Table 1.
[0062] A soot body weighing 40 kg excluding the seed rod was manufactured, and it was possible to manufacture the soot body without breaking or cracking and the thickness t of the half-glass region was t=32 mm, which was approximately the same as in Example 1.
[0063] The soot bod...
Embodiment 3
[0065] A hemisphere of R50 was formed by grinding on the tip of a cylindrical unstained quartz rod (diameter φ100 mm), and the surface roughness of the processed surface at this time was Rz=100 μm to prepare a seed rod.
[0066] Using this kind of rod, through the VAD method, the raw material is silicon tetrachloride, the combustible gas is hydrogen, the combustible gas is oxygen, and the non-combustible gas is nitrogen, and then introduced into the concentric multiple tube burner, while burning The soot body is produced while the hydrolysis reaction is carried out in the flame, creating a semi-glazed area. Details of the production conditions are shown in Table 1.
[0067] A soot body weighing 40 kg excluding the seed rod was manufactured, and it was possible to manufacture the soot body without breakage or cracks, and the thickness t of the half-glass region was t=34 mm, which was approximately the same as in Example 1. The same soot body was further fabricated five times, ...
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