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Method for detecting defects of thin-film transistor panel and device thereof

A technology of thin film transistors and detection methods, which is applied in the field of detection methods and detection equipment for thin film transistor panel defects, and can solve problems such as broken wires and short circuit defects that are difficult to detect

Inactive Publication Date: 2018-09-14
CENT TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, the problem to be solved by the present invention is how to overcome the problem that the disconnection and short-circuit defect of the circuit in the Array section are difficult to detect, so that the disconnection and short-circuit defect of the circuit can be repaired in the Array section. The problem that the defective location needs to be located, and how to overcome the problem of repairing the defective location according to the repair path, etc.

Method used

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  • Method for detecting defects of thin-film transistor panel and device thereof
  • Method for detecting defects of thin-film transistor panel and device thereof
  • Method for detecting defects of thin-film transistor panel and device thereof

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Embodiment

[0036] 1. A detection method for defects in a thin film transistor (TFT) panel, comprising applying a voltage to the circuit of the panel, wherein the circuit comprises a plurality of positions, and a thermal imager is used to scan the plurality of positions to obtain the plurality of positions A plurality of temperature image data of a position, and comparing the plurality of temperature image data with normal temperature image data to detect abnormal image data, when it is determined that the temperature of the corresponding position represented by the abnormal image data is high When the user sets the value, all the positions corresponding to the abnormal images are marked as the positions with defects, so as to facilitate subsequent processes.

[0037] 2. The detection method according to embodiment 1, further comprising touching the circuit with a probe, and then applying the voltage.

[0038] 3. The detection method according to embodiment 1 or 2, wherein the position wi...

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Abstract

The present invention discloses a method for detecting defects in the thin-Film transistor (TFT) panel and a device thereof. The method includes applying a voltage to circuits of the panel, wherein each circuit includes plural positions; utilizing a thermal imager to scan the plural positions to obtain plural temperature image data of the plural positions, and comparing the plural temperature image data with a normal temperature image data to detect an abnormal image datum. When the temperature of a specific position corresponding to the abnormal image datum is determined to be higher than a user's default value, the position corresponding to the abnormal image datum is labeled as a position with defect so that the following process proceeds.

Description

technical field [0001] The invention relates to a defect detection method and detection equipment of a thin film transistor panel, in particular to a defect detection method and detection equipment which use a thermal imager to scan lines on the panel. Background technique [0002] At present, Taiwan's panel industry is dominated by thin-film transistor (Thin-Film Transistor, TFT) liquid crystal display (Liquid Crystal Display, LCD), which uses a TFT panel and another color filter (ColorFilter, CF) , and then filled with liquid crystal to form. Its process includes the front-end array (Array) process and the rear-end panel assembly (Cell) process. In the process of TFT panel (Panel) production, it must first use an electrical testing device to detect its defects to ensure the integrity of the product. The quality is impeccable. [0003] see figure 1 , showing a non-contact detection technology for defects in a TFT panel 10, using a sensor head (sensor head) 11 as a feedin...

Claims

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Application Information

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IPC IPC(8): H01L21/66G01N25/72
CPCG01N25/72H01L22/12
Inventor 庄文忠
Owner CENT TECH CORP
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