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A kind of mask plate and preparation method thereof

A mask and mask technology, used in semiconductor/solid-state device manufacturing, vacuum evaporation plating, coating, etc., can solve the problems of small opening size, product quality damage, mask opening blockage, etc.

Active Publication Date: 2021-04-27
BOE TECH GRP CO LTD
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  • Abstract
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Problems solved by technology

However, for RGB-SBS OLED products with high pixel (PPI), such as micro-display OLED products, because the precision of the fine evaporation mask required by it is often relatively high, and the opening size is relatively small, therefore, in the mask During use, it is easy to cause the opening of the mask to be blocked, thereby deteriorating the product quality

Method used

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  • A kind of mask plate and preparation method thereof
  • A kind of mask plate and preparation method thereof
  • A kind of mask plate and preparation method thereof

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Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] Please refer to Figure 1 ~ Figure 3 .

[0027] Such as figure 1 and figure 2 As shown, the embodiment of the present invention provides a mask plate 1, including a mask body 2 and a coating 3 formed on the mask body 2; wherein:

[0028] The adsorption of the coating 3 to organic materials is worse than that of the mask body 2 to organic materials.

[0029] Above-mentioned mask plate 1, because its mask body 2 surface has coating 3, and this coatin...

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Abstract

The invention relates to the technical field of evaporation, and discloses a mask plate and a preparation method thereof, wherein the mask plate comprises a mask body and a coating formed on the mask body; wherein: the coating is effective for organic materials The adsorption property of the mask body is worse than the adsorption property of the mask body to the organic material. The above-mentioned mask has a coating on the surface of the mask body, and the adsorption of the coating to the organic material is relatively poor, and further, when the mask is used for vapor deposition, the vapor deposition material is not easily adsorbed on the mask. Therefore, the opening of the mask is not easy to be blocked, so that the service life of the mask is longer; and the mask can have higher precision and smaller pattern opening, which is especially suitable for preparing high PPI OLED products can improve the evaporation yield of products.

Description

technical field [0001] The invention relates to the field of vapor deposition technology, in particular to a mask plate and a preparation method thereof. Background technique [0002] At present, organic electroluminescent display (OLED, Organic Light Emitting Display) mainly includes white light OLED (WOLED) and red, green, blue pixel juxtaposition type (RGB-SBS, Side-By-Side) OLED, among them, RGB-SBS type OLED products have the advantages of small brightness loss and high color gamut. Therefore, in the field of micro-display, especially in the field of virtual reality (VR) and augmented reality (AR) display, RGB-SBS OLED is an inevitable trend. [0003] In the prior art, RGB-SBS OLED products are mainly prepared by vapor-depositing R, G, and B pixels on a fine metal mask (FMM). However, for RGB-SBS OLED products with high pixel (PPI), such as micro-display OLED products, because the precision of the fine evaporation mask required by it is often relatively high, and the o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04H01L51/56
CPCC23C14/04H10K71/00
Inventor 王灿张粲杨明岳晗丛宁玄明花陈小川
Owner BOE TECH GRP CO LTD