Dust filter installed in semiconductor exhaust gas treatment device
A technology of waste gas treatment equipment and dust filter, which is applied in the direction of combined devices, chemical instruments and methods, and the separation of dispersed particles, which can solve the problems of inability to filter dust, and achieve the effect of easy maintenance and repair, simple and convenient disassembly and assembly
Pending Publication Date: 2018-10-09
安徽京仪自动化装备技术有限公司
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[0004] Aiming at the deficiencies of the prior art, the present invention provides a dust filter installed in semiconductor waste gas treatment equipment, which solves the problem that the traditional dust filter proposed in the above background technology cannot completely filter the dust
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[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0021] Such as Figure 1-3 As shown, the embodiment of the present invention provides a dust filter installed in a semiconductor waste gas treatment equipment, including a filter housing 1, a controller is fixedly mounted on the outer surface of the filter housing 1, and the output of the controller is connected to the first The input ends of the air pump 4, the dust sensor 9, the servo motor 11, and the second air pump 14 are telecommun...
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The invention provides a dust filter installed in a semiconductor exhaust gas treatment device and relates to the technical field of dust filters. The dust filter installed in the semiconductor exhaust gas treatment device includes a filter housing. A cavity is movably mounted in the filter housing. The outer surface of the left side of the cavity is communicated with a gas inlet pipe. The outer surface of the gas inlet pipe is fixedly provided with a first air pump. A dust collecting tank is arranged in one side of the cavity. An electrostatic adsorption plate is fixedly mounted in the dust collecting tank. The dust filter installed in a semiconductor exhaust gas treatment device can well filter and collect dust in exhaust gas, prevent inner and outer device damage caused by dust, preventdamage to the human body and realize centralized cleaning of dust in the dust collecting tank, is easy to maintain and repair and can be simply mounted and dismounted.
Description
Technical field [0001] The invention relates to the technical field of dust filters, in particular to a dust filter installed in semiconductor waste gas treatment equipment. Background technique [0002] The dust filter in the semiconductor waste gas treatment equipment is a kind of dust filter installed in the semiconductor waste gas treatment equipment to purify the waste gas generated during the processing of the semiconductor waste gas treatment equipment to achieve the effect of protecting the environment. Nowadays, the semiconductor industry is developing rapidly. The application is more and more extensive, and it has played an indelible role in the development of the semiconductor industry. [0003] However, the traditional dust filter cannot completely filter the dust. After the filtering process, a certain amount of dust is often left in it. When the exhaust gas is discharged, it will pollute the environment outside the equipment and cause the dust to fly. The health of n...
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IPC IPC(8): B01D50/00
CPCB01D50/00
Inventor 杨春水曹小康司马超张坤赵力行邹昭平蒋俊海于浩
Owner 安徽京仪自动化装备技术有限公司