An Electromagnetically Controlled Contact Type Variable Stiffness Micro/Nano Probe

Abstract

The invention relates to an electromagnetically controlled contact variable-stiffness micro-nano probe comprising sensitive elastic beams, a pseudo equilateral triangle connector, C-shaped frames, cylindrical permanent magnets, and cylindrical coils. The inner end of each sensitive elastic beam is connected with a short side of the pseudo equilateral triangular connector. The outer end of each sensitive elastic beam is connected with the inner side of an annular bracket. The upper and lower surfaces of each sensitive elastic beam are provided with sensors. The center of the pseudo equilateraltriangular connector is fixed to the tail end of a stepped measuring rod. The long sides of the pseudo equilateral triangle connector are connected with rigid crossbeams. The cylindrical coils are symmetrically mounted on the inner sides of the C-shaped frames. The cylindrical permanent magnets are connected with the rigid crossbeams. The cylindrical permanent magnets and the cylindrical coils constitute an electromagnetic control portion. The electromagnetic control portion can adjust the stiffness of the probe, and helps to reduce the false trigger caused by the inertial force of the probe and the potential damage caused by van der Waals force. The system is simple in structure, convenient to control and good in practicability.

Description

technical field [0001] The invention relates to a precision measuring head, in particular to an electromagnetically controlled contact type variable stiffness micro-nano measuring head. Background technique [0002] With the rapid development of MEMS technology, many micro-devices have emerged, and the surface feature scale of these devices is usually at the micron level, or even at the nanometer level. When the electromagnetic variable stiffness micro-nano probe measures the micro-surface topography of the workpiece, the measuring ball on the top of the stepped measuring rod contacts the surface of the workpiece to be measured, and the contact force acts on the central body along the measuring rod to change its position and posture, thus aligning with the center The sensitive beam connected to the body produces a small deformation, which triggers the strain sensor on the sensitive beam, and records the coordinate value of the measuring point through the corresponding conver...

AI Technical Summary

Problems solved by technology

At present, the contact micro-nano probe adopts fixed stiffness, and there are some known problems as follows: 1. The stiffness of the probe is fixed, and it is almost impossible to achieve isotropy; 2. If the stiffness of the probe is relatively high, it is easy to scratch during the measurement 3. If the stiffness of the probe is too small, the dynamic response of the probe will slow down, the resonance frequency will be low, and the stability will be poor; 4. The inertial force generated when the probe approaches or moves away from the workpiece quickly may cause false triggering ;5. The van der Waals force between the measuring ball and the workpiece will cause potential damage to the suspension system of the measuring head; 6. The existing pressure rod type variable stiffness measuring head is prone to center deviation of the measuring rod

Images