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Substrate for sensing, a method of fabricating the substrate

A technology of substrates and metal nanoparticles, applied in nanotechnology for materials and surface science, manufacturing microstructure devices, nanotechnology for sensing, etc., can solve the problem of low detection sensitivity

Active Publication Date: 2018-12-04
SAMSUNG ELECTRONICS CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In particular, due to the discovery of the surface-enhanced Raman scattering (SERS) phenomenon (the Raman signal of molecules adsorbed by rough surface-treated metal substrates is significantly enhanced), conventional Raman spectroscopy is caused by very small Raman scattering light signal intensity The disadvantage of low detection sensitivity is improved

Method used

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  • Substrate for sensing, a method of fabricating the substrate
  • Substrate for sensing, a method of fabricating the substrate
  • Substrate for sensing, a method of fabricating the substrate

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Embodiment Construction

[0048] Hereinafter, example embodiments of a substrate for sensing, a method of manufacturing the substrate, and an analysis apparatus including the substrate are described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals denote the same elements, and the size of components may be exaggerated for convenience and clarity of description. In addition, the exemplary embodiments to be described below are merely illustrative, and various modifications can be made to these exemplary embodiments. In addition, in the layer structure to be described below, the expression "on the upper part of" or "on" may include not only the meaning of being directly on / below / left / right, but also the meaning of being indirectly on / down / left / right.

[0049] As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Expressions such as "at least one" preceding a list of elements modify the entire l...

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Abstract

A substrate for sensing and a method of manufacturing the substrate are provided. The substrate for sensing includes: a support layer; a plurality of metal nanoparticle clusters arranged on the support layer; and a plurality of perforations arranged among the plurality of metal nanoparticle clusters. The plurality of metal nanoparticle clusters each comprise a plurality of metal nanoparticles stacked in a three-dimensional structure. Each of the plurality of perforations transmits incident light therethrough.

Description

[0001] Cross references to related patent applications [0002] This application claims the benefit of U.S. Provisional Application No. 62 / 510,917, filed May 25, 2017, in the U.S. Patent and Trademark Office, the disclosure of which is incorporated herein by reference in its entirety. technical field [0003] Devices and methods according to example embodiments relate to a substrate for sensing, a method of manufacturing a substrate, and an analysis device including a substrate, and more particularly, to a surface-enhanced Raman scattering (SERS) substrate, a method for fabricating a highly uniform large A method for forming a SERS substrate and a biological information analysis device including the SERS substrate. Background technique [0004] Raman spectroscopy can be used to analyze the composition of various materials by measuring inelastic scattering that occurs inside an object due to excitation by light incident on the object. When light is incident on a sample to be...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65B81C1/00
CPCB81C1/00031G01N21/658B81B2201/0214B82Y15/00B82Y30/00B81C1/00206B81B2203/0361B81B2207/056B81C2201/0104H01L21/02601H01L21/02573H01L21/02603H01L21/02205H01L21/324H01L21/02623C23C18/06C23C18/08G01J3/4412
Inventor 梁大钟赵显俊尹永竣朱爀
Owner SAMSUNG ELECTRONICS CO LTD