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A micro-component operating device and method for four-needle integrated condensation compliance control

A compliant control and operating device technology, applied in micro manipulators, manufacturing tools, chucks, etc., can solve the problems of difficult direct application, difficult to realize real-time control of liquid media, single pick-up or release process, etc., to ensure stable acquisition and easy digitization Intelligent control, avoid the effect of borrowing

Active Publication Date: 2021-07-23
SHANDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing liquid medium micro-component operation method only focuses on a single picking or releasing process, it is difficult to realize the real-time control of the liquid medium in the whole operation process, and the attitude adjustment after picking, it is difficult to directly apply

Method used

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  • A micro-component operating device and method for four-needle integrated condensation compliance control
  • A micro-component operating device and method for four-needle integrated condensation compliance control
  • A micro-component operating device and method for four-needle integrated condensation compliance control

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Experimental program
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specific Embodiment approach 1

[0018] Specific implementation mode one: combine figure 1 , figure 2 with image 3 Explain, a four-needle integrated condensation compliance control micro-component operating device described in this embodiment includes a micro-drive motor 1-2, an adapter plate 1-3, three uniformly distributed threaded adapter holes 1-1, Integrated piezoelectric ceramic driver 1-4, refrigeration adapter 1-5, central shaft connector 2-1, probe adapter 2-2 and integrated probe 1-6, micro drive motor 1-2 installation On the adapter board 1-3, one end of the integrated piezoelectric ceramic driver 1-4 is axially connected to the micro drive motor 1-2, and the other end is fixedly connected to the probe adapter 2-2, and the integrated probe 1-6 Including No. 1 probe 3-1, No. 2 probe 3-2, No. 3 probe 3-5 and spindle probe 3-3, probe adapter 2-2 connected to cooling adapter 1-5, spindle The probe 3-3 is fixedly connected to the central shaft connector 2-1.

specific Embodiment approach 2

[0019] Specific implementation mode two: combination figure 1 , figure 2 with image 3 Note that the No. 1 probe 3-1, the No. 2 probe 3-2 and the No. 3 probe 3-5 in this embodiment are uniformly arranged at 120 degrees, and the spindle probe 3-3 is arranged in the center. Such setting is convenient for angle adjustment, and brass straightened wire or stainless steel straight wire can be used as the probe, and other components and connections are the same as those in Embodiment 1.

specific Embodiment approach 3

[0020] Specific implementation mode three: combination figure 1 , figure 2 with image 3 Note that the integrated probe 1-6 in this embodiment has a hydrophobic coating and exhibits a hydrophobic function, and the No. 1 probe 3-1, the No. 2 probe 3-2 and the No. 3-5 is connected and sealed with the probe adapter 2-2, the spindle probe 3-3 and the central shaft connector 2-1. Such setting is conducive to creating stable liquid medium conditions and adjusting the protruding angle of the probe. The probe can be treated with hydrophobicity by chemical etching and heptadecafluorodecyltrimethoxysilane. The other composition and connection relationship are the same as the specific embodiment 1. or two the same.

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Abstract

A micro-component operating device and method for four-needle integrated condensation compliance control. The present invention relates to micro-component operation and micro-assembly technology. In order to solve the problem of capillary force operation in the prior art, the present invention generally focuses on a single pick-up or release process. It is difficult to realize the integration of real-time liquid medium acquisition, compliant posture adjustment and release, which leads to the key problem of operation failure. It includes micro drive motor, adapter plate, three uniformly distributed thread adapter holes, integrated piezoelectric ceramic driver, refrigeration Adapter, central shaft connector, probe adapter and integrated probe. The micro drive motor is installed on the adapter plate. One end of the integrated piezoelectric ceramic driver is axially connected to the micro drive motor, and the other end is fixedly connected to the probe. Needle adapter, the integrated probe includes No. 1 probe, No. 2 probe, No. 3 probe and spindle probe. The probe adapter is connected to the cooling adapter. The invention is used for the soft pick-up of micro components, Integrated operation of attitude adjustment and release.

Description

technical field [0001] The invention relates to the field of compliant operation and assembly of micro-components, in particular to a micro-component operating device and method for four-needle integrated condensation compliant control. Background technique [0002] The operation technology of micro-components (feature size 200 μm-5 mm) is an important means of micro-electromechanical system manufacturing and micro-device assembly. Through the flexible operation method, it can be used when operating micro-components with light weight, brittle texture and strong adhesion. , to avoid damage to micro-components, in order to achieve effective operation process and improve the success rate. At present, the commonly used micro-component manipulation methods mainly include mechanical clamping, vacuum adsorption and adhesion control methods. Mechanical clamping mainly uses a two-finger, three-finger or multi-finger structure as the end execution unit, and uses the friction force be...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J7/00B25J15/00
CPCB25J7/00B25J15/0019B25J15/008
Inventor 范增华魏修亭田业冰高军
Owner SHANDONG UNIV OF TECH
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