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Vertical microfluidic probe head with large scale surface processing apertures

A microfluidic probe and microfluidic technology, applied in the field of microfluidics, can solve the problems of not being able to maintain HFC and not suitable for handling large areas

Active Publication Date: 2018-12-21
IBM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] Current vertical MFPs cannot sustain HFC on the centimeter-long scale
More generally, current vertical MFPs are not well suited to handle large areas

Method used

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  • Vertical microfluidic probe head with large scale surface processing apertures
  • Vertical microfluidic probe head with large scale surface processing apertures
  • Vertical microfluidic probe head with large scale surface processing apertures

Examples

Experimental program
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Effect test

Embodiment Construction

[0043] One or more embodiments of the invention relate to vertical MFPs suitable for large surface processing.

[0044] In the prior art, the microchannels and orifices of vertical MFPs are formed at the interface between two layers, namely, the body (eg, Si wafer) and the lid. The length of the aperture corresponds to the depth of the channel slotted in the body of the MFP head. Thus, the length extends laterally to the main surface of the body. The width of the aperture is parallel to the main surface of the body.

[0045] Therefore, and achievable, extending the surface processing capabilities of prior art, vertical MFPs is a priori difficult. On the one hand, the length of the orifice can hardly be increased, since the maximum length of the orifice is determined by the depth of the microchannel, which is necessarily limited by the thickness of the body on which the microchannel is grooved. For example, in current vertical MFP probes, injection and pumping channels are e...

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PUM

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Abstract

One or more embodiments of the present invention are directed to a vertical microfluidic probe head, which comprises a middle layer of material and two outer layers. The middle layer comprises two opposite, main surfaces, which are, each, grooved up to a same edge surface that adjoins each of the main surfaces, so as to form two sets of n microchannel cavities, n >= 1, on each of the opposite mainsurfaces. The middle layer is furthermore arranged between the two outer layers, which (at least partly) close the microchannel cavities grooved on the two main surfaces. This way, two sets of n microchannels are formed, which are, each, open on the edge surface, such that two opposite sets of n orifices are formed on the edge surface. Thus, the length of the apertures is not limited by the thickness of the middle layer.

Description

Background technique [0001] The present invention relates generally to the field of microfluidics, and more particularly to vertical microfluidic probe heads. [0002] Microfluidics deals with the precise control and manipulation of the behavior of small volumes of fluids that are typically confined to micrometer-length-scale channels and volumes typically in the submilliliter range. The outstanding features of microfluidics stem from the special behavior that liquids exhibit on the micrometer length scale. By fabricating structures with lateral dimensions in the micrometer range, volumes well below 1 nanoliter can be processed and analyzed. Mass-limited reactions can be accelerated (by diffusion of reactants). Finally, parallel liquid flow can be precisely and reproducibly controlled, allowing chemical reactions and gradients at liquid / liquid and liquid / solid interfaces. [0003] More specifically, typical fluid volumes in microfluidics range from 10 -15 L to 10 -5 L, an...

Claims

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Application Information

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IPC IPC(8): B01J19/00
CPCB01L3/0255B01L3/5027B01L2300/0861B01L2300/0887B01J19/0093B01L2200/0605B81B1/00
Inventor G·凯加拉R·拉夫奇克D·P·泰勒I·奇夫
Owner IBM CORP
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