Vertical microfluidic probe head with large scale surface processing apertures
A microfluidic probe and microfluidic technology, applied in the field of microfluidics, can solve the problems of not being able to maintain HFC and not suitable for handling large areas
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[0043] One or more embodiments of the invention relate to vertical MFPs suitable for large surface processing.
[0044] In the prior art, the microchannels and orifices of vertical MFPs are formed at the interface between two layers, namely, the body (eg, Si wafer) and the lid. The length of the aperture corresponds to the depth of the channel slotted in the body of the MFP head. Thus, the length extends laterally to the main surface of the body. The width of the aperture is parallel to the main surface of the body.
[0045] Therefore, and achievable, extending the surface processing capabilities of prior art, vertical MFPs is a priori difficult. On the one hand, the length of the orifice can hardly be increased, since the maximum length of the orifice is determined by the depth of the microchannel, which is necessarily limited by the thickness of the body on which the microchannel is grooved. For example, in current vertical MFP probes, injection and pumping channels are e...
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