An MEMS inertial switch based on three-section long inclined beam bistable structure
An inertial switch and bistable technology, applied in the field of MEMS inertial switches, can solve problems such as difficult processing, inapplicable anti-electromagnetic interference, and prone to malfunction, etc., to achieve high sensitivity, good anti-electromagnetic interference, and anti-mechanical vibration powerful effect
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[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0028] The object of the present invention is to provide a MEMS inertial switch based on a three-section long inclined beam bistable structure, which has the advantages of high sensitivity, strong anti-electromagnetic interference ability and strong anti-mechanical vibration ability.
[0029] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below i...
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