Interface circuit of capacitive accelerometer sensor
一种接口电路、加速度计的技术,应用在接口电路领域,能够解决没有提供装置增益大小和范围调整、没有提供可编程性要求等问题,达到增益调整容易的效果
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[0032] Embodiments of the present invention will now be described in detail with reference to the accompanying drawings. The invention will be described in the context of a capacitive accelerometer comprising two capacitors. However, the disclosed capacitive accelerometer is not limited to a solution including two capacitors. The disclosed accelerometers can be used as multi-axis accelerometers (eg, axes x, y and z). Identical or corresponding functional and structural elements that appear in different figures are assigned the same reference numerals.
[0033] image 3 A capacitive accelerometer system or device 1, referred to simply as a capacitive accelerometer or accelerometer, according to an example of the present invention is shown. A microelectromechanical system (MEMS) used as capacitive accelerometer sensor 3 is shown. In this example, the sensor 3 includes a first electrode, a second electrode and a third electrode. In this example, all electrodes are plate elec...
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