Coil adjustment mechanism, induction heating device and vapor deposition equipment
A coil adjustment and induction coil technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve problems such as inability to adjust the distance between the coil and the tray, separation of the lead screw coil, and damage.
Active Publication Date: 2020-11-10
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
However, in this coil adjustment mechanism, the lead screw is easily separated from the coil, resulting in damage, which leads to the inability to adjust the distance between the coil and the tray
Method used
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[0055] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.
[0056] The inventors of the present invention have repeatedly studied and found that the reason why the coil adjustment mechanism 110 in the prior art is easily separated from the coil 120 is that when the screw nut rotates, due to the existence of friction, the screw nut easily drives the wire. The bars spin together. After the lead screw rotates, it is easy to separate from the coil 120 .
[0057] In order to solve the above problems, as an aspect of the present invention, a coil adjustment mechanism is provided, such as image 3 As shown, the coil adjustment mechanism includes a rotating member 111 and a movement conversion assembly 112 . The movement conv...
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The invention provides a coil adjusting mechanism. The coil adjusting mechanism comprises a rotating piece and a movement transformation piece which is connected with the rotating piece, the movementtransformation piece is used for transforming rotary movement of the rotating piece into linear movement in the rotating axis direction of the rotating piece, and the movement transformation piece comprises an installation piece, a moving rod and at least one positioning piece, wherein the moving rod is arranged in the installation piece, and the axis direction of the moving rod is identical to the rotating axis direction of the rotating piece. When the rotating piece rotates around the rotating axis, the moving rod can be driven to move in the axis direction of the moving rod, the positioningpieces are arranged between the moving rod and the installation piece so as to limit the position of the moving rod and prevent the moving rod from rotating around the rotating axis. The invention further provides an induction heating device and a vapor deposition device. According to the coil adjusting mechanism and the induction heating device, the coil adjusting mechanism is not likely to be separated from the coil.
Description
technical field [0001] The invention relates to the field of vapor deposition equipment, in particular to a coil adjustment mechanism, an induction heating device and vapor deposition equipment. Background technique [0002] The vapor phase deposition method is a method that uses gases to react with each other at high temperature to prepare epitaxial thin film layers. A method of vapor deposition needs to be performed using specialized vapor deposition equipment. [0003] figure 1 Shown in is a vapor deposition apparatus from figure 1 It can be seen from the figure that the vapor deposition equipment includes an induction heating device 100 , a process chamber 200 and a tray 300 disposed in the process chamber 200 . The tray 300 is heated by the induction heating device 100 so as to reach the temperature required by the vapor deposition equipment. [0004] In order to adjust the temperature uniformity of the tray 300 , it is necessary to use the coil adjustment mechanism...
Claims
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IPC IPC(8): C23C16/52C23C16/46
CPCC23C16/46C23C16/52
Inventor 廖凤英
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD