Robust motion signal extraction method for micromechanical resonator

Abstract

The invention discloses a robust motion signal extraction method for a micromechanical resonator. Upper-sideband in-phase demodulation, upper-sideband quadrature demodulation, lower-sideband in-phasedemodulation and lower-sideband quadrature demodulation are carried out to obtain an upper-sideband amplitude, an upper-sideband phase, a lower-sideband amplitude, and a lower-sideband phase. The resonant amplitude signal of the resonator is the half of the sum of the upper-sideband amplitude and the lower-sideband amplitude and the resonant phase signal of the resonator is the half of the difference between the lower-sideband phase and the upper-sideband phase, so that the influences on the amplitude gain and the phase lag of the interface circuit by the environment factor and the driving frequency are eliminated and the environment robustness is realized. According to the invention, the principle is simple; and the robust motion signal extraction method can be applied to the motion signal extraction of a micromechanical resonator like a micromechanical gyroscope.

Description

technical field [0001] The invention relates to a micromechanical resonator, in particular to a robust method for extracting motion signals of a micromechanical resonator. Background technique [0002] Under the action of time-varying driving force or driving voltage, the relative mechanical motion between the internal structures of the micromechanical resonator generates a motion signal. The circuit is a high-pass filter composed of an operational amplifier, so that the low-frequency noise generated by the analog components of the interface circuit can be avoided from being mixed in the resonator, and the interface circuit can prevent the low-frequency noise from passing through, so that the motion signal can be extracted through digital signal processing. Amplitude and phase, automatic gain control techniques and phase-locked loop techniques use this amplitude and phase for closed-loop control of micromechanical resonators. [0003] Limited by the temperature effect of th...

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Problems solved by technology

However, the motion amplitude and phase extracted by these two traditional demodulation methods are affected by the amplitude gain and phase lag of the interface circuit, which limits the accuracy of the extracted amplitude and phase, which leads to the inability of the automatic gain control technology to make the resonator The amplitude of the resonator reaches the controlled amount, and the phase-locked loop technology cannot control the phase of the resonator at the set value

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