A nano-patterning system and method for rotary near-field lithography
A processing method and nano-patterning technology, applied in the field of nano-processing, can solve the problems of low aspect ratio and poor pattern quality of nano-pattern processing, and achieve the effects of low-quality nano-pattern processing, improved strength and distribution, and low cost.
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[0044] The following describes the embodiments of the present invention in detail, and those skilled in the art will understand that the following embodiments are intended to explain the present invention, and should not be regarded as limiting the present invention. Unless otherwise specified, if the specific techniques or conditions are not clearly described in the following examples, those skilled in the art can carry out according to the commonly used techniques or conditions in this field or according to the product instructions. The reagents or instruments used were not indicated by the manufacturer, and they were all conventional products available in the market.
[0045] The present invention is a nano-pattern processing method for rotary near-field lithography, specifically comprising the following steps:
[0046] (1) First select the circular disc substrate material, the present embodiment selects the aluminum alloy disc as the substrate, such as figure 1 shown;
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