Linear array image sensor image array and object surface defect detection method

Abstract

The invention relates to a linear array image sensor image array and an object surface defect detection method. The pixel array comprises two or three pixel array units, wherein each pixel array unitat least comprises a line of pixels, at least one pixel array unit comprises A-type pixels, the other pixel array units comprises B-type pixels, microlenses of the A-type pixels of the same pixel array horizontally deviate in the same direction, the deviation distance is not smaller than a single edge of the pixel size by one fifth, the maximum distance does not exceed the single edge of the pixelsize by half, and microlenses of the B-type pixels are coincided with a pixel geometrical center. With the adoption of the linear array image sensor pixel array, an incident angle of a main light raycorresponding to each line of pixels can be deduced by adjusting the change range of angle response sensitivity ratio and the proportion change degree of the same line of pixels, the morphology of adetected object surface is reduced, and the refined detection on defects such as irregularly-shaped size, type and morphology of the detected object surface is achieved.

Description

technical field [0001] The invention belongs to the design field of linear array image sensors, and relates to a pixel array of a linear array image sensor and a detection method for object surface defects. Background technique [0002] The photosensitive pixel structure of the image sensor captures the radiation and reflected light energy of the target object, and collects the main ray photons incident at a certain angle to the pixel depletion area to form electron-hole pairs, which are sampled and converted by the back-end circuit to generate electrical signals, thereby restoring the target The detailed information of the image of the object, the structure of the pixel and the circuit section such as figure 1 shown. [0003] The line array image sensor chip uses a row of pixel arrays as the imaging unit, and forms two-dimensional image data as a result of the motion of the object. A linear array image sensor device can arrange multiple rows of pixel arrays, and each row ...

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Problems solved by technology

[0005] like Figure 3a , 3b As shown, each pixel microlens of the existing line array image sensor coincides with the center of the pixel. For mass detection or detection of high-speed moving objects, it only relies on the pixel response caused by the difference in reflected or emitted light energy on the surface of the measured object. The difference is not enough to finely test, measure, and identify irregularities on the surface of the target object

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