RF MEMS electrostatic driving switch microwave characteristic analysis method based on flexible substrate bending condition
A flexible substrate, electrostatic drive technology, applied in the field of mechanical analysis, can solve problems such as blank space
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[0074] The present invention will be further explained below in conjunction with the accompanying drawings.
[0075] First, for the double-ended fixed beam electrostatic drive switch:
[0076] Such as figure 1 As shown, the present invention takes the RF MEMS double-end fixed beam as an example. In this embodiment, the value of each parameter is taken. The material of the RFMEMS double-end fixed beam electrostatically driven switch beam is gold, and the flexible substrate material is liquid crystal polymer. (LCP), beam length L=600 μm, beam width w=100 μm, beam thickness t=2 μm, initial distance between upper and lower plates g=2 μm, beam Young’s modulus E=78Gpa, Poisson’s ratio n=0.42 . Assuming that the above-mentioned RF MEMS double-terminal fixed beam electrostatic drive switch initially has biaxial residual compressive stress, the beam buckles upward, and the maximum buckling distance h=0.5μm, as the flexible substrate gradually bends, the curvature of the substrate gra...
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