Electronic optical system

A technology of electron optics and incident electrons, applied in the field of electron optics system, can solve the problems of large aberration, difficult debugging of optical system, low measurement efficiency, etc., and achieve the effect of reducing aberration, small aberration, and simple debugging

Active Publication Date: 2019-03-15
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the object of the present invention is to provide an electron optical system, which can solve the problem of multi-channel electron spin analysis in the prior art when the electron optical system is used in a multi-channel electron spin analyzer. Problems such as low measurement efficiency, large aberration, and difficulty in debugging the optical system

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Embodiment approach

[0048] Specifically, the two-dimensional image-type electron detector 5 may be any device capable of recording electron intensity distribution. As an embodiment of the present invention, the two-dimensional image electron detector 5 is composed of a micro-channel plate (Micro-channel Plate, MCP), a fluorescent plate and a high-sensitivity camera. As another embodiment of the present invention, the two-dimensional image electron detector 5 is composed of a microchannel plate and a delay line detector (Delay Line Detector, DLD).

[0049] It should be noted that those skilled in the art should understand that the above description is only an example rather than a limitation to the present invention. In fact, any combination of a non-axisymmetric lens group and a magnetic field to bend the incident electron beam It is incident on the scattering target at an optimal incident angle and is imaged at a specific plane relative to the scattering target. At the same time, the outgoing el...

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Abstract

The invention provides an electronic optical system. The electronic optical system at least comprises a magnetic field and a non-axisymmetric lens group, wherein the magnetic field is used for separating motional orbits of initial incident electrons and outgoing electrons and achieving deflection of an electron motion direction, so that the initial incident electrons deflect by a first set angle,and the outgoing electrons deflect by a second predetermined angle; the non-axisymmetric lens group is used for compensating the asymmetry of the optical properties of electrons in the magnetic fieldin directions perpendicular and parallel to the magnetic field, so that the aberration is reduced and cooperates with the magnetic field, so that electron beams are simultaneously imaged on an image plane along two directions perpendicular and parallel to the magnetic field; and meanwhile, axisymmetric electro lenses can realize a deflection function of the electron beams, so that the electronic optical system is easy to debug.

Description

[0001] This application is a divisional application for a patent with an application date of September 7, 2017, an application number of 201710800610.3, and an invention name of an image-type electron spin analyzer. technical field [0002] The invention relates to the technical field of electron spin analysis, in particular to an electron optical system. Background technique [0003] At present, analyzers for measuring electron spin mainly include Mott type, Spin-LEED type, and VLEED type analyzers. Among them, the measurement method of the Mott-type analyzer is: first accelerate the electrons to a kinetic energy of 20-100KeV, and then make the electrons scatter on a target with a high spin-orbit interaction material (usually composed of high atomic number elements), by measuring the scattered electrons The spin of the incident electron is measured by the asymmetry of the intensity; the Spin-LEED analyzer measures the intensity of the diffraction spot of the electron on the...

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Application Information

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IPC IPC(8): G01N24/00
CPCG01N24/00G01T1/32
Inventor 乔山
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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