The present invention discloses a method, device and storage medium for calculating
space charge limited current, wherein the method comprises: S1, determining the structural model between the
cathode metal plate and the
anode dielectric plate; S2, using two
current density values as inputs of the Poisson trajectory process, calculating the amount of charge injected per unit time, and calculating the amount of charge in the process of calculating the
electron trajectory and depositing it on the grid; S3, obtaining the potential distribution, and solving the
electric field of each point by polynomial fitting through the extrapolation process according to the
electric field definition; S4, using the
secant method to obtain the updated
current density, and obtaining the input
current density of the next Poisson trajectory process according to the current density; S5, outputting the final
current density distribution. The present invention provides a
space charge limited current calculation scheme for a non-
parallel plate structure, iteratively solves the
electron motion trajectory in the process of calculating the
electron trajectory, explores the motion law of particles under the influence of
space charge, and can be widely used in the field of electronic devices.