Cleaning appliance, cleaning method, and liquid supply device

A technology for cleaning liquids and utensils, applied to devices for coating liquids on surfaces, cleaning methods and utensils, chemical instruments and methods, etc.

Active Publication Date: 2021-09-07
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, such a problem is not unique to indirect pressurized tanks, but also occurs when attaching and detaching couplings to other liquid storage bodies (barrels, Nowpak (registered trademark), etc.)

Method used

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  • Cleaning appliance, cleaning method, and liquid supply device
  • Cleaning appliance, cleaning method, and liquid supply device
  • Cleaning appliance, cleaning method, and liquid supply device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038] figure 1 It is a figure which schematically shows the whole structure of the coating apparatus provided with the liquid supply apparatus which concerns on one Embodiment of this invention. This coating device 1 is a slit coater for coating a coating liquid on an upper surface Wf of a substrate W obtained from figure 1 It is carried in a horizontal position with the left-hand side facing the right-hand side. In addition, in each of the following figures, in order to clarify the arrangement relationship of each part of the device, the conveyance direction of the substrate W is referred to as "X direction". figure 1 The horizontal direction from the left-hand side to the right-hand side is called "+X direction", and the opposite direction is called "-X direction". In addition, in the horizontal direction Y perpendicular to the X direction, the front side of the device is referred to as "−Y direction", and the rear side of the device is referred to as "+Y direction". In ...

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PUM

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Abstract

The present invention relates to a cleaning tool, a cleaning method, and a liquid supply device for better cleaning a coupling with a cleaning liquid in a short time. The piping of the cover part, by inserting the piping into the interior of the liquid storage body, the liquid stored in the interior can be taken out through the piping, and the cleaning tool has: a container with an opening into which the piping can be inserted; An internal space for accommodating the piping via the opening, and a holding portion installed near the opening of the container for holding the coupler detached from the liquid storage body; The space communicates with the interior of the piping to clean the piping, and the interstitial space is formed between the inner surface of the container and the outer surface of the piping in which the piping is housed in the internal space. Space.

Description

technical field [0001] The present invention relates to a cleaning technology for cleaning a coupler (Coupler) which is inserted into a liquid storage body through a pipe provided through a cover and taken out through the pipe, and a liquid supply device using the cleaning technology. The liquid stored in the liquid storage body, wherein the cover portion can be freely attached to and detached from the liquid storage body. Background technique [0002] Conventionally, in a substrate processing apparatus for applying a coating liquid to a substrate, for example, a nozzle that ejects a coating liquid from a discharge port as described in Japanese Patent No. 5346643 is generally used. Although not described in detail in Japanese Patent No. 5346643, in order to supply the coating liquid to the nozzle, a liquid supply device is provided on the substrate processing apparatus. The coating liquid is supplied to the nozzle. As this liquid supply device, for example, the configurati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B9/023B08B9/027B08B3/08B05C11/10
CPCB05C11/10B08B3/08B08B9/023B08B9/027
Inventor 安陪裕滋高村幸宏
Owner DAINIPPON SCREEN MTG CO LTD
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