Shape-preserving acid-cleaning device for large-caliber planar element and cleaning method

A flat element and large-diameter technology, applied in the field of large-diameter flat components, can solve problems such as affecting the damage resistance threshold of components, and achieve the effect of improving the surface damage threshold, convenient operation and effective removal.

Inactive Publication Date: 2019-04-09
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Although magnetorheological polishing has obvious advantages in terms of stability and certainty, during the polishing process, iron powder will embed about 45nm on the surface of the planar component, forming an induced damage source, which seriously affects the damage resistance threshold of the component
At present, there are no related reports on simple, effective and rapid pickling for such large-sized components without destroying the original surface shape.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Shape-preserving acid-cleaning device for large-caliber planar element and cleaning method
  • Shape-preserving acid-cleaning device for large-caliber planar element and cleaning method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] For a planar fused silica element with a specification of 810mm×430mm×90mm, the initial surface shape is 0.3λ (λ=632.8nm), and it is required to uniformly etch 60nm to remove the polishing layer without destroying the original surface shape.

[0027] A method for cleaning large-diameter planar components using a conformal pickling device for large-diameter planar components comprises the following steps:

[0028] 1) Prepare the mixed aqueous solution of hydrofluoric acid and ammonium fluoride, wherein the weight percentage of hydrofluoric acid is 1.1%, the weight percentage of ammonium fluoride is 14.8%, and the prepared hydrofluoric acid and ammonium fluoride are mixed The aqueous solution is added in the first pickling tank 6 and the second pickling tank 7, and the liquid level height of the first pickling tank 6 should be able to ensure that there are no large-diameter planar components; inject deionized water into the water washing tank 5, when the large When the ca...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a shape-preserving acid-cleaning device for a large-caliber planar element and a cleaning method. The cleaning device comprises a fixed cross beam, a balancing rod, a balancingblock, a tool clamp, a water-cleaning groove, a first acid-cleaning groove, a second acid-cleaning groove, a first circulating pump, a second circulating pump, a pure-water groove, a third circulating pump and a waste-water groove. The shape-preserving acid-cleaning device and the cleaning method disclosed by the invention have the beneficial effects that under the premise of preserving the original surface shape of the large-caliber planar element, high-efficiency surface acid cleaning can be realized.

Description

technical field [0001] The invention relates to a large-diameter planar element, in particular to a shape-conserving pickling device and a cleaning method for a large-diameter planar element. Background technique [0002] Surface laser damage reduces the service life of optical components in high-energy laser systems, and the ability to resist laser damage of fused silica devices working under triple-frequency laser irradiation limits the maximum output flux of the system. The damage originates from the subbandgap optical absorption of subsurface defects, where the absorptive defects, chemical impurities in the polished layer (also called Beilby layer), such as Ce, La, Al, Cu, Fe, etc., exhibit a strong The sub-band gap absorption properties are the main damage inducing source. [0003] With the rapid development of modern science and technology, higher and higher requirements are put forward for optical components used in various optical systems. For large-scale optical c...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): C03C15/02
CPCC03C15/02
Inventor 程鑫魏朝阳邵建达顾昊金吴福林沈良
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap