A scanning method of a cascaded prism sub-beam coarse and fine two-stage scanning device
A technology of scanning device and scanning method, which is applied in the direction of optics, optical components, instruments, etc., can solve problems affecting the scanning accuracy of prisms, and achieve the effects of compact structure, easy implementation, and simple control process
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[0046] This application proposes a scanning method of a cascaded prism sub-beam coarse-fine two-stage scanning device, wherein the cascaded prism sub-beam coarse-fine two-stage scanning device includes a fine scanning prism pair and a coarse scanning prism pair arranged before and after, such as figure 1 As shown, the coarse scanning prism pair includes a first rotating prism 1 and a second rotating prism 2 with the same wedge angle, and the fine scanning prism pair includes a third rotating prism 3 and a fourth rotating prism 4 with the same wedge angle. Specifically, the patent " The structure of cascaded prism sub-beam coarse and fine two-stage scanning device" (CN106526835A). The first, second, third, and fourth rotating prisms 4 are arranged in sequence on the same optical axis O-Z and can rotate independently, as shown in the figure θ 1 , θ 2 , θ 3 and θ 4 Respectively represent the rotation angles of the four rotating prisms. Scanning plane 5 is arranged in front of t...
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