Rapid planeness measuring method
A measurement method and flatness technology, applied in the detection field, can solve problems such as large errors, low efficiency, and difficulty in achieving high product consistency, and achieve fast and accurate flatness measurement with high consistency
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[0018] The present invention will be described in further detail below.
[0019] A fast measuring method for flatness, comprising the steps of:
[0020] Step 1, placing the sample to be tested on a horizontal platform with the tested side facing down;
[0021] Step 2, multiple laser displacement sensors are installed inside the horizontal platform, and measuring holes are set on the platform;
[0022] Step 3, turn on the laser displacement sensor, and at the same time move the sample to be tested, and use the laser displacement sensor to scan multiple positions on the surface of the sample;
[0023] Step 4, the laser displacement sensor automatically writes the measurement results into the acquisition program, and extracts the maximum and minimum values to obtain flatness information;
[0024] Step five, automatically fill in the measurement results into the output template, and print the flatness test report.
[0025] Preferably, the horizontal platform in step 1 is a ma...
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